Skip to main content Accessibility help
×
Home

Mechanical Testing of Free-Standing Thin Films

  • W. N. Sharpe (a1) and K. J. Hemker (a1)

Abstract

An overview is given of methods for testing thin-film tensile specimens of either MEMS materials or surface coatings. MEMS specimens are deposited in a final shape and need only to be released for testing, while specimens of coating materials must be extracted. Very brief descriptions of the specimen designs, force application approaches, and strain measurements are given along with a limited number of references. Representative stress-strain curves for polysilicon, silicon nitride, silicon carbide, electroplated nickel and diffusion aluminide bond coating are presented. Results at high temperatures are presented for the latter two materials.

Copyright

References

Hide All
1. Hollman, P., Alahelisten, A., Olsson, M., and Hogmark, S., Thin Solid Films, 270, 137142, (1995).
2. Jones, P. T., Johnson, G. C., and Howe, R. T., ASME DSC 59, 325330, (1996).
3. Biebl, M., Brandl, G., and Howe, R. T., Transducers ' 95, 8083, (1995).
4. Vlassak, J. J. and Nix, W. D., J. Materials Research 7, 32423249, (1992).
5. Kobrinsky, M., Deutsch, E., and Senturia, S., MEMS 1, ASME, 3–10, (1999).
6. Jensen, B. D., De Boer, M. P., Masters, N. D., Bitsie, F., and LaVan, D. A., J. Microelectromechanical Systems, 10, 336346, (2001).
7. Tsuchiya, T., Tabata, O., Sakata, J., and Taga, Y., Proc. IEEE Tenth Annual International Workshop on MEMS, 529534, (1997).
8. Sharpe, W. N. Jr, Yuan, B., and Edwards, R. L., J. Microelectromechanical Systems 6, 193199, (1997).
9. Sharpe, W. N. Jr, The MEMS Handbook, CRC Press, 3-1 to 333, (2001).
10. Yu, M. F., Lourie, O., Dyer, M. J., Moloni, K., Kelly, T. F., and Ruoff, R. S., Science 287, 637–40, (2000).
11. Sharpe, W. N. Jr, Danley, D., and LaVan, D. A., Small Specimen Test Techniques, ASTM STP 1329, 497512, (1998).
12. Sharpe, W. N. Jr, and McAleavey, A., Proc. SPIE, 3512, (1998).
13. Read, D. T. and Dally, J. W., J. Materials Research 8, 15421549, (1992).
14. Brown, S. B., Edwards, R. L., Panth, R., Bergstrom, J., Coles, G., and Sharpe, W. N. Jr, MRS Symposium B, B9.2, (2001).
15. Sharpe, W. N. Jr, Eby, M.A., and Coles, G., Proc. Transducers ' 01, 13661369, (2001).
16. LaVan, D. A., Tsuchiya, T., Coles, G., Knauss, W. G., Chasiotis, I., and Read, D., Mechanical Properties of Structural Films, ASTM STP 1413, (2001).
17. Sharpe, W. N. Jr, Turner, K. T., and Edwards, R. L., Exp. Mechanics 39, 162170, (1999).
18. Kapels, H., Urscher, J., Aigner, R., Sattler, R., Wachutka, G., and Binder, J., Eurosensors XIII, 12B1, 379382, (1999).
19. Haque, M. A. and Saif, M. T. A., Proc. Transducers ' 01, 13741377, (2001).
20. Cornella, G., Vinci, R. P., Iyer, R. S., Dauskardt, R. H., and Bravman, J. C., Mat. Res. Soc. Symp. Proc., 518, 8186, (1998).
21. Sharpe, W. N. Jr, NASA Technical Memorandum 101638, (1989).
22. Bucheit, T., Glass, S., VaVan, D., Mani, S., Friedmann, T., and Sullivan, J., ASME IMECE, MAT–8, (2001).
23. Chasiotis, I. and Knauss, W. G., Proc. Society for Experimental Mechanics, 5661, (2000).
24. Hemker, K. J., Cho, H. S., Desta, Y., Lian, K., and Goettert, J., J. Microsystem Tech., in press (2001).
25. Pan, D., Glynn, M., Chen, M., and Hemker, K.J., Creep Deformation: Fundamentals and Applications, Eds. Mishra, R.S., Earthman, J.C. and Raj, S.V., TMS Publications, in press, (2001).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed