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Mechanical Property Evaluation of Electroplated High Aspect Ratio Microstructures

Published online by Cambridge University Press:  10 February 2011

L. S. Stephens ,
K.W. Kelly ,
E.I. Meletis  and
S. Simhadri
L. S. Stephens
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA 70803stephens@me.lsu.edu
K.W. Kelly
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA 70803stephens@me.lsu.edu
E.I. Meletis
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA 70803stephens@me.lsu.edu
S. Simhadri
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA 70803stephens@me.lsu.edu
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Abstract

High aspect ratio microstructures (HARMs) with a height of hundreds of micrometers and a width of a few tens of micrometers present high promise in a number of challenging fields. At LSU, a number of applications are being developed in which nickel HARMs are electroplated on metal surfaces (mold insert fabrication for the LIGA process, HARMs on mechanical seal faces, HARMs on heat exchange surfaces, etc.). In some of these applications, the HARMs are subjected to high stresses and the mechanical properties are particularly important. These properties can be used to adjust processing parameters to optimize properties of the HARMS.

This paper presents a method for measuring the strength properties of cantilevered nickel HARMs constructed by LIGA. Experimentally measured values are reported for modulus of rupture (1280 MPa), Young's modulus (153 GPa) and Knoop hardness (500 Hk) for HARMs with an overplated base. SEM micrographs clearly indicate that failure of the beams is brittle and most frequently occurs at the interface of the beam and overplated base.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 518: Symposium N – Microelectromechanical Structures for Materials Research , 1998 , 173
Copyright
Copyright © Materials Research Society 1998

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