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Mechanical properties of SU-8

Published online by Cambridge University Press:  10 February 2011

A. Mcaleavey ,
G. Coles ,
R. L. Edwards  and
W. N. Sharpe Jr.
A. Mcaleavey
Affiliation:
ME Department, Johns Hopkins University, Baltimore, MD 21218, sharpe@jhu.edu
G. Coles
Affiliation:
ME Department, Johns Hopkins University, Baltimore, MD 21218, sharpe@jhu.edu
R. L. Edwards
Affiliation:
Applied Physics Laboratory, Johns Hopkins University, Laurel, MD 20723
W. N. Sharpe Jr.
Affiliation:
Applied Physics Laboratory, Johns Hopkins University, Laurel, MD 20723
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Abstract

An existing test system for recording the stress-strain curves of metal microspecimens has been used to measure the strength of the ultrathick photoresist SU-8. The microspecimens are 3 mm long with a gage section 0.2 mm wide. The SU-8-25 specimens were 0.08 mm thick with an average strength of nearly 120 MPa, and the SU-8-50 specimens were 0.125 or 0.145 mm thick with an average strength of 130 MPa. Measurements of Young's modulus proved difficult, but a preliminary value of 3 GPa was obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 546: Symposium AA – Materials Science of Microelectromechanical Systems (MEMS)… , 1998 , 213
Copyright
Copyright © Materials Research Society 1999

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References

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