Skip to main content Accessibility help
×
Home

Mechanical properties of SU-8

  • A. Mcaleavey (a1), G. Coles (a1), R. L. Edwards (a2) and W. N. Sharpe (a2)

Abstract

An existing test system for recording the stress-strain curves of metal microspecimens has been used to measure the strength of the ultrathick photoresist SU-8. The microspecimens are 3 mm long with a gage section 0.2 mm wide. The SU-8-25 specimens were 0.08 mm thick with an average strength of nearly 120 MPa, and the SU-8-50 specimens were 0.125 or 0.145 mm thick with an average strength of 130 MPa. Measurements of Young's modulus proved difficult, but a preliminary value of 3 GPa was obtained.

Copyright

References

Hide All
1. Lee, K. Y. and 6 co-authors, “Micromachining Applications of a High Resolution Ultrathick Photoresist”, J. of Vac. Sci. Technol., pp. 3012–3016 (1995).
2. Despont, M., and 5 co-authors, “High-Aspect-Ratio Ultrathick Negative-Tone Near-UV Photoresist for MEMS Applications”, Proc. Tenth IEEE Int'l. Workshop on MEMS, Nagoya, Japan, pp. 518522 (1997).
3. Lorenz, H. and 5 co-authors "SU-8: a Low-Cost Negative Resist for MEMS”, J. Micromech. Microeng., pp. 121–124 (1997).
4. Lorenz, H. and 5 co-authors, “High-Aspect-Ratio, Ultrathick, Negative-Tone Near-UV Photoresist and its Applications for MEMS”, Sensors and Actuators A 64, pp. 3339 (1998).
5. Lorenz, H., Despont, M., Vettiger, P., and Renaud, P., “Fabrication of Photoplastic High-Aspect Ratio Microparts and Micromolds using SU-8 UV Resist”, Microsyst. Tech., pp. 143–146 (1998).
6. Lorenz, H., Laudon, M., and Renaud, P., “Mechanical Characterization of a New High-Aspect- Ratio Near UV-Photoresist”, Microelect. Engr., pp. 371374 (1998).
7. Sharpe, W. N., Jr., LaVan, D. A. and Edwards, R. L., “Mechanical Properties of LIGADeposited Nickel for MEMS Transducers”, Proceedings of Transducers '97, Chicago, IL, pp. 607610 (1997).
8. Sharpe, W. N., Jr., Yuan, B., and Edwards, R. L., “A New Technique for Measuring the Mechanical Properties of Thin Films”, J. of Microelectromechanical Systems, pp. 193–199 (1997).
9. LaVan, D. A. and Sharpe, W. N., Jr., “Tensile Testing of Microsamples”, Experimental Mechanics, in press, (1998).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed