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Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

  • Youngman Kim (a1) and Sung-Ho Choo (a2)

Abstract

The mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.

In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

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1. Pike, Andrew, Gardner, Julian W., Sensors and Actuators B45 (1997) 19
2. Lee, J. S., Shin, S. M., Park, J. W., Korea J. Mater. Res. 7 (1997) 102
3. Lim, J. W., Lee, S. M., Kang, B. H., Chung, W. Y., Lee, D. D., J. Korean. Sensors Soc. 8 (1999) 115
4. Nix, William D., Medalist, R. F. Mehl, Metall. Trans. A, 20A (1989) 2217
5. Gouldstone, A., Shen, Y-L., Suresh, S., Thompson, C. V., J. Mater. Res. 13 (1998) 1956
6. Kim, Youngman, J. Electronic Materials 26[9] (1997) 1002
7. Cho, K-H, Kim, Youngman, J. Mater. Res. 14[5] (1999) 1996
8. Stoney, G., Royal Society of London Proc. A82 (1909) 172
9. Koike, J., Utsunomiya, S., Shimoyama, Y., Maruyama, K., Oikawa, H., J. Mater. Res. 13 (1998) 3256
10. Chang, G. K., Kim, M. Y., Bang, Y. I., Chang, H. J., Korean J. Mater. Res. 9 (1999) 229
11. Lee, J. S., Park, H. D., Shin, S. M., Park, J. W., Korean J. Mater. Res. 6 (1996) 204

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