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Measurement of Effective Longitudinal Piezoelectric Coefficient of thin Films by Direct Piezoelectric Effect

  • F. Xu (a1), F. Chu (a1), J. F. Shepard (a1) and S. Trolier-McKinstry (a1)

Abstract

This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ∼ 5 pC/N, while poled films have values up to 220 pC/N.

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Measurement of Effective Longitudinal Piezoelectric Coefficient of thin Films by Direct Piezoelectric Effect

  • F. Xu (a1), F. Chu (a1), J. F. Shepard (a1) and S. Trolier-McKinstry (a1)

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