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Measurement of Effective Longitudinal Piezoelectric Coefficient of thin Films by Direct Piezoelectric Effect

Published online by Cambridge University Press:  10 February 2011

F. Xu ,
F. Chu ,
J. F. Shepard Jr  and
S. Trolier-McKinstry
F. Xu
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
F. Chu
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
J. F. Shepard Jr
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
S. Trolier-McKinstry
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
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Abstract

This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ∼ 5 pC/N, while poled films have values up to 220 pC/N.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 427
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1. Nemirevsky, Y., Nemirovsky, A., Muralt, P., Setter, N., Sensors and Actuat. A, 56 (1996) 239 Google Scholar
2. Zhu, X., Kim, E. S., in Proceedings of Actuator'97, Chicago, p. 837 (1997)Google Scholar
3. Bernstein, J. J., Finberg, S. L., Houston, K., Niles, L. C., Chen, H. D., Cross, L.E., Li, K.K., and Udaykumar, K., IEEE Transaction on Ultrasonics Ferroelectrics and Freq. Control, 44, 960 (1997)Google Scholar
4. IEEE Standard on Piezoelectricity, ANSI/IEEE, Std., 176 (1988)Google Scholar
5. Pan, W. Y. and Cross, L.E., Rev. Sci. Instrum., 60, 2071 (1989)Google Scholar
6. Zhang, Q. M., Pan, W. Y. and Cross, L.E., J. Appl. Phys., 63, 2492 (1988)Google Scholar
7. Li, J. F., Viehland, D. D., Tani, T., Lakeman, C. D. E., and Payne, D. A., J. Appl. Phys., 75, 442 (1994)Google Scholar
8. Kholkin, A. L., Wutchrich, C., Taylor, D. V. and Setter, N., Rev. Sci. Instrum. 67, 1 (1996)Google Scholar
9. Xu, F. and Trolier-McKinstry, S., Proceedings of 10th International Symposium on Applications of Ferroelectrics, New Brunswick, New Jersey, 1996.Google Scholar
10. Lefki, K. and Dormans, J. M., J. Appl. Phys., 76, 1764 (1994)Google Scholar
11. Jaffe, B., Cook, W. R., and Jaffe, H., Piezoelectric Ceramics, Academic, London, P. 19 (1971)Google Scholar
12. Shepard, J. F. Jr, Moses, P. J., and Trolier-McKinstry, S., submitted to Sensors and Actuators, 1997 Google Scholar
13. Chu, F, Su, T., and Trolier-McKinstry, S., The 8th US-Japan Seminar on Dielectric and Piezoelectric Ceramics, Plymouth, Mass., 1997 Google Scholar