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A Mathematical Model of the Gas-Phase and Surface Chemistry in GaAs Mocvd

  • Michael E. Coltrin (a1) and Robert J. Kee (a2)

Abstract

This paper presents a detailed mathematical model of the coupled gas-phase chem- istry, surface chemistry, and fluid mechanics in the MOCVD of GaAs from trimethylgallium and arsine in a rotating-disk reactor. The model predicts steady-state deposition rates as a function of susceptor temperature and partial pressure of the reactants. Rate constants in the model have been adjusted to match experimental deposition rates from the literature.

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1. Hess, D. W., Jensen, K. F., and Anderson, T. J., Rev. Chem. Eng., 3, 97 (1985).
2. Jensen, K. F., Chem. Eng. Sci., 42, 923 (1987).
3. Coltrin, M. E., Kee, R. J., and Miller, J. A., J. Electrochem. Soc. 131, 425 (1984).
4. Coltrin, M. E., Kee, R. J., and Miller, J. A., J. Electrochem. Soc. 133, 1206 (1986).
5. Coltrin, M. E., Kee, R. J., and Evans, G. H., J. Electrochem. Soc., 136, 819 (1989).
6. Breiland, W. G., Coltrin, M. E., and Ho, P., J. Appl. Phys. 59, 3267 (1986).
7. Breiland, W. G., Ho, P., and Coltrin, M. E., J. Appl. Phys. 60, 1505 (1986).
8. Reep, D. H. and Ghandhi, S. K., J. Electrochem. Soc., 130, 675 (1983).
9. Pollard, R., and Newman, J., J. Electrochem. Soc. 127, 744 (1980).
10. Tirtowidjojo, M. and Pollard, R., J. Cryst. Growth, 93, 108 (1988).
11. Creighton, J. R., private communication.
12. Wagner, A. F. and Wardlaw, D. M., J. Phys. Chem., 92, 2462 (1988).
13. Clark, T. C. and Dove, J. E., Can. J. Chem., 51, 2147 (1973).
14. Warnatz, J., Combustion Chemistry, (Gardiner, W. C., Ed.), Springer, 1984.
15. Dixon-Lewis, G., Phil. Trans. R. Soc. Lond., A303, 181 (1981).
16. Glarborg, P., Miller, J. A., and Kee, R. J., Combust. and Flame, 65, 177 (1986).
17. Jacko, M. G. and Price, S. J. W., Can. J. Phys., 41, 1560 (1963).
18. Tirtowidjojo, M. and Pollard, R., J. Cryst. Growth, 77, 200 (1986).
19. Gilbert, R. G., Luther, K., and Troe, J., Ber. Bunsenges. Phys. Chem., 87, 161 (1983).
20. Larsen, C. A., Buchan, N. I., and Stringfellow, G. B., Appl. Phys. Lett., 52, 480 (1988).

A Mathematical Model of the Gas-Phase and Surface Chemistry in GaAs Mocvd

  • Michael E. Coltrin (a1) and Robert J. Kee (a2)

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