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Materials Development of Thin Film TiNi Ferroelastic-Ferroelectric Heterostructures

Published online by Cambridge University Press:  15 February 2011

A. Peter Jardine
A. Peter Jardine*
Affiliation:
Dept. of Materials Science, SUNY Stony Brook, Stony Brook, N.Y.
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Abstract

Active and adaptive thin film materials for “smart” materials will likely be a heterostructure of several types of thin films. In this investigation, deposition and processing of thin film Shape Memory Effect TiNi and thin film ferroelectric BaTiO3 and SrTiO3 are discussed. Growth conditions as well as the thermodynamic conditions for thin films are described. It was found that amorphous thin films of TiNi and BaTiO3 can be crystallized simultaneously by air annealing at 600°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 31
Copyright
Copyright © Materials Research Society 1992

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References

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