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Mass Spectrometric Study of Laser-Induced Chemical Vapor Deposition of Gold

Published online by Cambridge University Press:  26 February 2011

Toivo T. Kodas  and
Paul B. Comita
Toivo T. Kodas
Affiliation:
IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120
Paul B. Comita
Affiliation:
IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120
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Abstract

A modulated surface temperature technique was used to study the surface chemical reactions occurring during the laser-assisted deposition of gold from dimethyl gold hexafluoroacetylacetonate. An argon ion laser was chopped and used to modulate the surface temperature on an area roughly 1 mm in diameter on an alumina substrate. Reactant and products of the photothermal reaction were sampled through an orifice located at the center of the deposit and were then introduced directly into a quadrupole mass filter. Since the reactant concentration at the surface decreased when the laser turned on while the product concentration at the surface increased when the laser turned on, modulating the surface reaction rate and employing phase-sensitive detection allowed the identification of reaction products.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 249
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

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