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Mass and Energy Analysis of Ionic Fragments from Photoablation of Polyimide

Published online by Cambridge University Press:  25 February 2011

G. Ulmer ,
K. Bues  and
E.E.B. Campbell
G. Ulmer
Affiliation:
Fakultät far Physik, Universität Freiburg, Hermann—Herder—Str. 3, D7800 Freiburg, Federal Republic of Germany
K. Bues
Affiliation:
Fakultät far Physik, Universität Freiburg, Hermann—Herder—Str. 3, D7800 Freiburg, Federal Republic of Germany
E.E.B. Campbell
Affiliation:
Fakultät far Physik, Universität Freiburg, Hermann—Herder—Str. 3, D7800 Freiburg, Federal Republic of Germany
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Abstract

The ionic products from excimer laser photoablation (λ = 308 nm) of polyimide (Kapton) film have been studied as a function of fluence. Large ion masses up to about 900 a.m.u. are easily observed, the mass distribution depending strongly on the fluence. Velocities of the emitted particles lie between 1400 and 10000 ms−1, again dependent on the fluence. A mechanism to explain the high velocities is suggested consisting of ionisation of the surface polymer molecules followed by a Coulomb explosion combined with expansion of the high density gas formed by the photoablation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 411
Copyright
Copyright © Materials Research Society 1989

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References

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