Exicimer laser induced luminsecence characteristics of type III fused silica was investigated. The luminescence characteristics in the ultraviolet wavelength region are strongly depending on the intensity of red luminescence at 650 nm. A sample without red luminescence shows a strong emission band at 280 nm. We found that the 280 nm band is corresponds to a absorption band at 225 nm. To clearfy the nature of the 280 nm band, we studied the difference of luminescence of samples which had been kept on heating under various atmosphares, i.e., N2, O2, He, H2, and air. By these results we suspect that the 280 nm band is related to hydrogen atom which are weakly bounded to the glass network.