Skip to main content Accessibility help
×
Home

Low Temperature Nitridatio of SiO2 Films using a Catalytic-CVD System

  • Akira Izumi (a1), Hidekazu Sato (a1) and Hideki Matsumura (a1)

Abstract

This paper reports a procedure for low-temperature nitridation of silicon dioxide (SiO2) surfaces using species produced by catalytic decomposition of NH3 on heated tungsten in catalytic chemical vapor deposition (Cat-CVD) system. The surface of SiO2/Si(100) was nitrided at temperatures as low as 200°C. X-ray photoelectron spectroscopy measurements revealed that incorporated N atoms are bound to Si atoms and O atoms and located top-surface of SiO2.

Copyright

References

Hide All
1. Gusev, E. P., Lu, H.-C., Garfunkel, E. L., Gustafsson, T. and Green, M. L., IBM J. Res. Develop. 43, 265 (1999).
2. Hori, T., IEEE Trans. Electron Devices 37, 2058 (1990).
3. Okada, S. and Matsumura, H., Jpn. J. Appl. Phys. 30, 3774 (1997).
4. Matsumura, H. and Tachibana, H., Appl. Phys. Lett. 47, 833 (1985).
5. Matsumura, H., Jpn. J. Appl. Phys. 37, 3175 (1998).
6. Izumi, A. and Matsumura, H., Appl. Phys. Lett. 71, 1371 (1997).
7. Izumi, A., Masuda, A., Okada, S. and Matsumura, H., Inst. Phys. Conf. Ser. No 155: Chapter 3, p.343 (1997).
8. Izumi, A., Masuda, A. and Matsumura, H., Thin Solid Films 343/344, 528 (1999).
9. Izumi, A., Sato, H., Hashioka, S., Kudo, M. and Matsumura, H., Microelectronic Engineering (1999) to be pubulished.
10. Hedge, R. I., Tobin, P. J., Reid, K. G., Maiti, B. and Ajria, S. A., Appl. Phys. Lett. 66, 2882 (1995).
11. Carr, E. C. and Buhrman, R. A., Appl. Phys. Lett. 63, 54 (1993).
12. Terman, L. M., Solid State Electron 5, 285 (1962).

Low Temperature Nitridatio of SiO2 Films using a Catalytic-CVD System

  • Akira Izumi (a1), Hidekazu Sato (a1) and Hideki Matsumura (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed