Skip to main content Accessibility help
×
Home

Low Temperature Deposition of Transparent Ultra Water-Repellent Thin Films by Microwave Plasma Enhanced Chemical Vapor Deposition

  • Yunying Wu (a1) (a2), Yasushi Inoue (a1), Hiroyuki Sugimura (a1) and Osamu Takai (a1)

Abstract

One of the most common methods for obtaining water repellent surfaces is spreading fluoropolymer or fluoroalkylsilane onto substrates. However, this method is not applicable to low heat-resistant substrates such as plastics, since after spreading, the method requires a heating process which is generally conducted at a temperature of about 600K. The objective of this study is the preparation of ultra water-repellent and optically transparent thin films at low temperatures below 373K. The films were deposited by means of microwave plasma enhanced plasma chemical vapor deposition (MPECVD) using organosilane, that is, trimethylmethoxysilane (TMMOS) as a source with adding Ar, CO2, N2, O2 or air as an excitation gas. Under optimized preparation conditions, films with water contact angles more than 150 degrees and optical transparencies more than 90% were successfully fabricated.

Copyright

References

Hide All
1. Onda, T., Shibuichi, S., Satoh, N., Tsujii, K., Langmuir 12, 2125 (1996).
2. Shibuichi, S., Onda, T., Satoh, N., Tsujii, K., J. Phys. Chem. 100, 19512 (1996).
3. Tadanaga, K., Koriko, N., Minami, T., J. Am. Ceram. Soc. 80, 1040 (1997).
4. Shibuichi, S., Yamamoto, T., Onad, T., Tsujii, K., J. Colloid Interf. Sci. 208, 287 (1998).
5. Sasaki, H., Shouji, M. Y., Hyomen Gijutsu 49, 944 (1998).
6. Bonnar, M. P., Burnside, B. M., Christie, J., Sceal, E. J., Troupe, C. E., Wilson, J. I. B., Chem. Vap. Deposition 5, 117 (1999).
7. Miwa, M., Nakajima, A., Fujishima, A., Hashimoto, K., Watanabe, T., Langmuir 16, 5754 (2000).
8. Takai, O., Hozumi, A., Sugimoto, N., J.Non-Crystal. Solids 218, 280 (1997).
9. Hozumi, A., Kondo, T., Kajita, I., Sekoguchi, H., Sugimoto, N., Takai, O., Jap. J. Appl. Phys. 36, 4959 (1997).
10. Hozumi, A., Takai, O., Thin Solid Films 303, 22 (1997).
11. Beamson, G., Briggs, D., “High Resolution XPS of Organic Polymers The Scienta ESCA300 Database,” John Wiley & Sons Ltd, Baffins Lane, Chichester West Sussex PO19 1UD, England, (1992).
12. Rau, C., Thin Solid Films 249, 28 (1994).

Related content

Powered by UNSILO

Low Temperature Deposition of Transparent Ultra Water-Repellent Thin Films by Microwave Plasma Enhanced Chemical Vapor Deposition

  • Yunying Wu (a1) (a2), Yasushi Inoue (a1), Hiroyuki Sugimura (a1) and Osamu Takai (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.