Skip to main content Accessibility help
×
Home

Low Permittivity SiO2/Void Nanocomposite Films

  • Amitabh Das (a1), R. Messier (a1), T. R. Gururaja (a1) and L. E. Cross (a1)

Abstract

A novel approach for preparing porous SiO2 thin films by sputter deposi-tion is being developed. The porosity is introduced to reduce the dielectric permittivity of the film to less than 3 for potential use in packaging high speed VLSIs. In the first approach, amorphous silicon is initially deposited to produce a columnar structure with a thickness of 25μm, followed by etching and thermal oxidation to result in closely spaced SiO2 pillars. Capping the structure by a thin film (0.1μm), silica gel layer provides the support for strip line traces. In the second approach, porous SiO2 films are prepared by reactive sputtering. The dielectric properties of the sputter deposited SiO2 films are presented.

Copyright

References

Hide All
1. Blodgett, A.J. Jr., Scientific American, Sept. 1983, p. 86–97.
2. Personal communications with Gilbert, B..
3. Pratt, I.H., Solid State Technology, December 1969, p. 49–57.
4. Gilbert, L.R., et al., Thin Solid Films, 54 (1978), 149157.
5. Messier, R., et al., J. Appl. Phys., 51 (3), March 1980, p. 16111614
6. Deal, and Grove, , Jpn. J. Appl. Phys., 36, (1965), p. 3370.
7. Katz, L.E., Chapter 4 in VLSI Technology, Edited by Sze, S.M., McGraw-Hill Publishing Co. (1983).
8. Pliskin, W.A., J. Vac. Sci. Technol. 14 (5) (Sept./Oct., 1977).
9. Valetta, R.M., et al., Electrochem. Technol. 4 (1966), p. 402406.
10. Girn, A.P., Ph.D. Thesis (1984), “Non-Uniform Physical Structure Model for Understanding the Electrochromic Behavior of Tungsten Oxide Thin Films,” The Pennsylvania State University, University Park, Pa.
11. Sumio, Sakka, Treatise on Materials Science and Technology, Vol.22, (1982), p. 129167.

Low Permittivity SiO2/Void Nanocomposite Films

  • Amitabh Das (a1), R. Messier (a1), T. R. Gururaja (a1) and L. E. Cross (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed