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Low Cost Integrated Sensors Utilizing Patterned Nano-Structured Titania Arrays Fabricated Using a Simple Process

  • Zuruzi Abu Samah (a1), Andrei Kolmakov (a2), Martin Moskovits (a2) and Noel C. MacDonald (a1)

Abstract

Using a novel low-temperature process, we demonstrate the facile integration of crack-free nanostructured titania (NST) as sensing elements in microsystems. Unlike conventional sol-gel methods, NST layers of interconnected nano-walls and nano-wires were formed by reacting Ti surfaces with aqueous hydrogen peroxide solution. Cracks were observed in NST layers formed on blanket Ti films but absent on arrays of patterned Ti pads below a threshold dimension. Analyses using TEM, high resolution SEM, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) reveal that NST consists of anatase TiO2 nano-crystals. NST pads were found able to detect oxygen gas of a few ppm. NST pad arrays were integrated on rigid and flexible substrates with potential applications in low cost and wearable sensing systems.

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Low Cost Integrated Sensors Utilizing Patterned Nano-Structured Titania Arrays Fabricated Using a Simple Process

  • Zuruzi Abu Samah (a1), Andrei Kolmakov (a2), Martin Moskovits (a2) and Noel C. MacDonald (a1)

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