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Liquid-Target Pulsed Laser Deposition and Its Application to Grow Diamond and Diamond-Like Carbon Films

Published online by Cambridge University Press:  15 February 2011

Rong-Fu Xiao
Rong-Fu Xiao*
Affiliation:
Department of Physics, the Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
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Abstract

A liquid-target pulsed laser deposition system has been designed to grow diamond and diamond-like carbon films using an organic liquid. The system has overcome the problem of target deterioration under high power laser irradiation and has prevented splashing of large particulares on the substrate. The technique is simple and safe to operate and the cost of source materials is much lower than in chemical vapor deposition experiments. With the introduction of oxygen (O2) gas during deposition, only diamond-like carbon is produced. Crystalline diamond films can be obtained when H2O2 is added along with O2 gas. The results provide a evidence that hydroxyl ions, OH-, together with atomic oxygen can indeed promote diamond growth.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 283
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

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