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Liquid Phase Epitaxial Growth of Semi-Insulating Aigalnas by Fe Doping

  • T. Tanahashi (a1), S. Okuda (a1), M. Kondo (a1), M. Sugawara (a1), S. Isozumi (a1) and K. Nakajima (a1)...

Abstract

Fe-doped semi-insulating AlGalnAs grown by liquid phase epitaxy has been studied and compared to Fe-doped GalnAsP. It has been found that semiinsulating AlGalnAs is easier to obtain than semi-insulating GalnAsP, because of its high iron distribution coeficient. The high resistivity of 1×109 ohm-cm has been obtained for Al0.481n0.52 As grown at 750°C. The activation energy of the Fe acceptor level in the AlGalnAs system has also been studied.

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Liquid Phase Epitaxial Growth of Semi-Insulating Aigalnas by Fe Doping

  • T. Tanahashi (a1), S. Okuda (a1), M. Kondo (a1), M. Sugawara (a1), S. Isozumi (a1) and K. Nakajima (a1)...

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