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Liquid Injection MOCVD of Rare-Earth Oxides Using New Alkoxide Precursors

  • Paul A. Williams (a1), Anthony C. Jones (a1) (a2), Helen C. Aspinall (a2), Jeffrey M. Gaskell (a2), Paul R. Chalker (a3), Paul A. Marshall (a3), Yim F. Loo (a2) and Lesley M. Smith (a1)...

Abstract

High purity lanthanum oxide and praseodymium oxide thin films (C< 1 at.-%) have been deposited by liquid injection MOCVD using the volatile alkoxide precursos [La(mmp)3] and [Pr(mmp)3] in toluene-solution (mmp = OCMe2CH2OMe). 1H NMR solution studies have shown that the addition of donor species, such as tetraglyme (CH3O(CH2CH2O)4CH3) or mmpH prevent molecular aggregation and help stabilise the precursors.

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