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Laser-Induced Thermal Decomposition of Platinum Metallo-Organic Films

  • A. Gupta (a1), R. C. Sausa (a1) and J. R. White (a2)


The focused output from an argon ion laser (514 nm) has been used to pattern micron-size platinum features by decomposition of spun-on metallo-organic film on quartz substrate. The role of laser power and energy density on the thermal decomposition of the film is studied using pulsed and cw laser irradiation. Transient reflectivity has been used as a probe to study the reaction steps involved in the decomposition of the metallo-organic containing film. Preliminary results on the use of the platinum features as seed layer for electroless copper plating is presented.



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