Skip to main content Accessibility help
×
Home

Laser-Induced Thermal Decomposition of Platinum Metallo-Organic Films

  • A. Gupta (a1), R. C. Sausa (a1) and J. R. White (a2)

Abstract

The focused output from an argon ion laser (514 nm) has been used to pattern micron-size platinum features by decomposition of spun-on metallo-organic film on quartz substrate. The role of laser power and energy density on the thermal decomposition of the film is studied using pulsed and cw laser irradiation. Transient reflectivity has been used as a probe to study the reaction steps involved in the decomposition of the metallo-organic containing film. Preliminary results on the use of the platinum features as seed layer for electroless copper plating is presented.

Copyright

References

Hide All
1. Jan, R.Y. and Allen, S.D., Proc Soc. Photo-Opt. Instrum. Eng., 71, 459 (1984).
2. Dutta, S., McMullin, P.G., Rai-Choudhury, P., and Gallagher, B.D., Laser Chemical Processing of Semiconductor Devices, Extended Abstracts, p70, (Materials Research Society, Pittsburgh, 1984).
3. Fisanick, G.J., Hopkins, J.B., Gross, M.E., Fennell, M.D., and Schnoes, K.J., Appl. Phys. Letters, 46, 12 (1985).
4. Fisanick, G.J., Gross, M.E., Hopkins, J.B., Fennell, M.D., Schnoes, K.J. and Katzir, A., J. Appl. Phys., 57, 1139 (1985).
5. Gross, M.E., Fisanick, G.J., Gallagher, P.K., Schnoes, K.J., and Fennell, M.D., Appl. Phys. Letters, 47, 9 (1985).
6. Houlding, V.H., Slattery, N.J., Beeson, K.W., and Frommer, J.E., Beam Induced Chemical Processes, Extended Abstracts, pp25, (Materials Research Society, Pittsburgh, 1985).
7. Milgram, A.A., J. Elecrochem. Soc., 118, 287 (1971).
8. Suzaki, Y. and Tachibana, A., Appl. Opt., 14, 2809 (1975).
9. Murakami, K., Takita, K., and Masuda, K., Jap. J. Appl. Phys., 20, L013 (1981).
10. Bruines, J.J.P., van Hal, R.P.M., Boots, H.M.J., Polman, A., and Saris, F.W., Appl. Phys. Lett. 49, 1160 (1986).
11. Duley, W.W., Laser Processing and Analysis of Materials, p89, (Plenum, New York, 1983).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed