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Laser-Induced Materials Synthesis of Ultrafine Ceramic Particles from Specially Designed Molecular Precursors

Published online by Cambridge University Press:  21 February 2011

Tongsan D. Xiao ,
Peter R. Strutt  and
Kenneth E. Gonsalves
Peter R. Strutt
Affiliation:
The University of Connecticut, Institute of Materials Science and Department of Metallurgy, U-136, Storrs, CT 06268.
Kenneth E. Gonsalves
Affiliation:
Stevens Institute of Technology, Department of Chemistry and Chemical Engineering, Hoboken, NJ 07030.
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Abstract

The investigation involved the synthesis of Si3N4 surface layers on a Ti substrate by a specially designed organosilazane liquid precursor, (CH3SiHNH)x with x=3 or 4, by pyrolysis with a 10.6 μm. continuous wave CO2 laser. Microstructural examinations revealed that the particles of the nitride layers were spherical in shape with diameters ranging from 50 to 150 nm. Based on the experimental evidence, suggestions are made of possible mechanisms occurring during film deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 155: Symposium L – Processing Science of Advanced Ceramics , 1989 , 247
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

1. Hayashi, C., J. Vac. Sci. Technol. A, 5, 1375 (1987).Google Scholar
2. Birringer, R., Herr, V., Gleiter, H., presented at the 1986 MRS Fall Meeting, Symposium: ‘Chemical Vapor Deposition of Ceramic Nanocomposites.’Google Scholar
3. Eastman, J. & Seigel, R., Research & Development, p.56, Jan. 1989.Google Scholar
4. Danforth, S. C. & Haggerty, J. S., J. Amer. Cerami Soc., 66, 58 (1983).Google Scholar
5. Cannon, W.R., Danforth, S. C., Flint, J. H., Haggerty, J. S., & Marra, R. A., J. Amer. Ceram. Soc., 65, 324 (1982).Google Scholar
6. Partridge, J. P. & Strutt, P. R., SPIE, 669, 150 (1986).Google Scholar
7. Strutt, P. R. & Partridge, J. P., Mat. Res. Soc. Symp. Proc. 98, 385 (1987).Google Scholar
8. Partridge, J. P. & Strutt, P. R., Mat. Res. Soc. Symp. Proc. 75, 273 (1987).Google Scholar
9. Ashby, M. F., Acta Met., 22, 275 (1974).Google Scholar
10. Terwilliger, C. R. and Lange, F. F., J. Amer. Ceram. Soc., 51, 25 (1974).Google Scholar