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Laser-Induced Deposition of Gold

  • Thomas H. Baum (a1)

Abstract

The laser-induced, vapor-phase deposition of gold metal from dimethyl-(2,4-pentanedionato) gold (III) and two fluorinated derivatives was examined by both photopyrolytic (LCVD) and photochemical modes of decomposition. High purity gold deposits are formed by LCVD with the rates of deposition being extremely vapor pressure dependent and thus, gold complex dependent. Photochemical deposition of gold patterns with 2 μm resolution can be achieved by irradiation of these complexes in the UV, but the deposited material is contaminated with carbon impurities.

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Laser-Induced Deposition of Gold

  • Thomas H. Baum (a1)

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