Skip to main content Accessibility help
×
Home

Laser-Induced Deposition of Gold Micropatterns from Metallopolymer Thin Films: A Photochemical Approach

  • V. H. Houlding (a1), N. S. Clements (a1), K. W. Beeson (a1) and G. A. West (a1)

Abstract

The deep ultraviolet (250 nm) photopatterning of spin-on films of polymeric Au mercaptide results in formation of adherent Au patterns. Fxcimer laser projection patterning and standard contact printing techniques give excellent pattern resolution on the micron scale. Laser direct write produces lines at very fast writing speeds. Exposed areas are less soluble than unexposed areas, i.e. the film behaves as a negative photoresist. Bakeout of developed patterns at 250°C yields good purity Au micropatterns up to 500 Å thick. Mechanistic information about pattern formation is gained from uv-visible, infrared, and mass spectrometric monitoring of the photolysis process, and from Auger analysis of films. Adherent patterns are apparently formed by photochemical cleavage of Au-S bonds followed by evaporation of a small amount of free mercaptide. The loss of ligand in the exposed areas renders them less soluble than unexposed film. Thermal decomposition of both photolyzed and unphotolyzed films has the same result of volatilizing all film material except Au.

Copyright

References

Hide All
1. Ehrlich, D.J. and Tsao, J.Y., J. Vac. Sci. Technol. B 1, 969 (1983).
2. von Gutfeld, R.J., in Laser Applications, vol.5, Ready, J.F. and Erf, R.K., eds., Academic Press, NY, 1984, p.1.
3. Yardley, J.T., in Laser Handbook, Bass, M. and Stich, M.L, eds., Elsevier Science Publishers, NY, 1985, p. 405.
4. Heiblum, M., Nathan, M.I., and Chang, C.A., Sol. State Electonics 25, 185 (1982) and references therein.
5. Baum, T.H. and Jones, C.R., Appl. Phys. Lett. 47, 538 (1985).
6. Aylett, M. and Haigh, J., Extended Abstracts, “Beam-Induced Chemical Processes” MRS Meeting, Dec. 1985, p.63.
7. Micheels, R.H., Darrow, A.D., and Rauh, R.D., Appl. Phys. Lett. 39, 418 (1981).
8. Karlicek, R.F., Donnelly, V.M., and Collins, G.J., J. Appl. Phys. 53, 1084 (1982).
9. Tamir, S. and Zahavi, J., J. Vac. Sci. Technol. A 3, 2312 (1985).
10. Jan, R.Y. and Allen, S.D., Proc. SPIE 459, “Laser Assisted Deposition, Etching, and Doping” SPIE, 1984, p. 71.
11. Fisanik, G.J., Gross, M.E., Hopkins, J.B., Fennell, M.D., Schnoes, K.J., and Katzir, A., J. Appl. Phys. 57, 1139 (1985).
12. Fisanik, G.J., Hopkins, J.B., Gross, M.E., Fennell, M.D., and Schnoes, K.J., Appl. Phys. Lett. 46, 1184 (1985).
13. Gross, M.E., Fisanik, G.J., Gallagher, P.K., Schnoes, K.J., and Fennell, M.D., Appl. Phys. Lett. 47, 923 (1985).
14. Gross, M.E., Appelbaum, A., and Schnoes, F.J., J. Appl. Phys. 60, 529 (1986).
15. Houlding, V.H., Slattery, N.J., and Beeson, K.W., Extended Abstracts, “Beam-Induced Chemical Processes”, MRS Meeting, Dec. 1985, p. 25.
16. Clements, N.S., Houlding, V.H., and Beeson, K.W., submitted to Appl. Phys. Lett. December 1986.
17. Simmons, E.L., J. Phys. Chem. 75, 588 (1971).
18. Values are typical of Au(I) nonaromatic mercaptides synthesized according to Fitch, H.M., U.S. Patent nos. 2,994,614, 3,163,665, and 3,268,568.
19. McAuliffe, C.A., Parrish, R.V., and Randall, P.D., J. Chem. Soc. Dalton 1979, 1730 (1979).

Laser-Induced Deposition of Gold Micropatterns from Metallopolymer Thin Films: A Photochemical Approach

  • V. H. Houlding (a1), N. S. Clements (a1), K. W. Beeson (a1) and G. A. West (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed