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Laser Micro-machining of Three-Dimensional Microstructures in Optical Materials

  • Xianghua Wang (a1), Pui To Lai (a2) and Anthony H.W. Choi (a3)

Abstract

We demostrate an advanced precision cutting tool using a 349 nm nanosecond-pulsed UV laser micromachining setup. After expansion and collimation, the laser beam is directed vertically and focused with a high performance triplet lens. With an Al mirror inserted in the path of the convergent beam, the beam can be focused on a horizontal machining plane at any desired tilting angles. Microstructures of a wide range of geometries on hard materials can be formed using this custom machining method. Conventional linear and rotary machining on sapphire materials have been demonstrated.

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1 , Li, Fuh, J., Wong, Yoke-San, “Overview of rapid prototyping and manufacturing,” Laser-Induced Materials and Processes for Rapid Prototyping, (Kluwer Academic 2001) pp. 18.
2 Gu, E., Jeon, C.W., Choi, H.W., Rice, G., Dawson, M.D., Illy, E.K. and Knowles, M.R.H., “Micromachining and dicing of sapphire, gallium nitride and micro-LED devices with UV copper vapour laser”, Thin Solid Films 453, 462 (2004).
3 Otani, T., Herbst, L., Heglin, M., Govorkov, S.V., and Wiessner, A.O., Appl. Phys. A 79, 1335 (2004).
4 Wang, X.H., Lai, P.T. and Choi, H.W., “Laser Micro-machining of Optical Microstructures with Inclined Sidewall Profile”, J. of Vac. Sci. and Tech. B. 2009 (unpublished)

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Laser Micro-machining of Three-Dimensional Microstructures in Optical Materials

  • Xianghua Wang (a1), Pui To Lai (a2) and Anthony H.W. Choi (a3)

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