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Laser Micro-machining of Three-Dimensional Microstructures in Optical Materials

Published online by Cambridge University Press:  31 January 2011

Xianghua Wang ,
Pui To Lai  and
Anthony H.W. Choi
Xianghua Wang
Affiliation:
xhwang@eee.hku.hk, The University of Hong Kong, Department of Electrical and Electronics Engineering, Hong Kong, Hong Kong
Pui To Lai
Affiliation:
laip@eee.hku.hk, The University of Hong Kong, Department of Electrical and Electronics Engineering, Hong Kong, Hong Kong
Anthony H.W. Choi
Affiliation:
hwchoi@eee.hku.hk, The University of Hong Kong, Department of Electrical and Electronics Engineering, Hong Kong, Hong Kong
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Abstract

We demostrate an advanced precision cutting tool using a 349 nm nanosecond-pulsed UV laser micromachining setup. After expansion and collimation, the laser beam is directed vertically and focused with a high performance triplet lens. With an Al mirror inserted in the path of the convergent beam, the beam can be focused on a horizontal machining plane at any desired tilting angles. Microstructures of a wide range of geometries on hard materials can be formed using this custom machining method. Conventional linear and rotary machining on sapphire materials have been demonstrated.

Keywords

ablationlaser-induced reactionmicrostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1179: Symposium BB – Material Systems and Processes for Three-Dimentional Micro-and Nanoscale Fabrication and Lithography , 2009 , 1179-BB06-30
Copyright
Copyright © Materials Research Society 2009

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References

REFERENCES

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