Skip to main content Accessibility help

Laser MBE for Atomically Defined Ceramic Film Growth

  • H. Koinuma (a1), M. Kawasaki (a1) and M. Yoshimoto (a1)


Laser MBE is a process especially useful for epitaxial layer-by-layer growth of ceramic thin films directly from sintered ceramic targets. By employing high vacuum MBE conditions, the process has a restriction in the controllability of chemical composition, e.g. nonstoi chiometry in oxides and nitrides, as compared with conventional pulsed laser deposition, but instead gains the possibility of in situ monitoring of surface reaction on an atomic scale by RHEED. Ever since our first success in observing RHEED intensity oscillation for CeO2 film growth on Si(l11), we have verified the molecular layer epitaxy by laser MBE for perovskite oxides (SrTiO3, BaTiO3, SrVO3 ,etc) and infinite-layer cuprates MCuO2 (M= Sr, Ba, Ca) on SrTiO3 substrates as well as for oxide and nitride films on Si substrates. Key factors to design the laser MBE system, operation parameters, and recent experimental results are presented and discussed.



Hide All
Esaki, L. and Tsu, R., IBMJ. Res. Dev. 14, 61 (1970).
Cheung, J. T., Niizawa, G., Moyle, J., Ong, N. P., Paine, B. M., and Vreeland, T. Jr., J. Vac. Sci. Technol., A4, 2086 (1986).
Bednorz, J. G. and Müller, K. A., Z. Phys. B, 64, 189 (1986).
Koinuma, H., MRS Bulletin, 19 (9), 21 (1994).
H. Koinuma, , M. Kawasaki, , M. Funabashi, , T. Hasegawa, , K. Kishio, , K. Kitazawa, , K. Fueki, , and S. Nagata, , J. Appl. Phys., 62, 1524 (1987).
Venkatesan, T., Wu, X. D., Dutta, B., Inam, A., Hegde, M. S., Hwang, D. M., Chang, C. C., Nazar, L. and Wilkens, B., Appl. Phys. Lett, 54, 581 (1986).
Koinuma, H., Bull. Mat. Sci., 18, 435 (1995).
Hashimoto, H., Kishio, K., and koinuma, H., Jpn. J. Appl. Phys., 30, 1685 (1991).
Koinuma, H. and Yoshimoto, M., Appl. Surf. Sci., 75, 308 (1994).
Laser MBE system of our design is commercially available from Pascal Co., Ltd. Yoshimoto, M., Ohkubo, H., Kanda, N., Koinuma, H., Jpn. J. Appl. Phys., 31, 3664 (1992).
Yoshimoto, M., Ohkubo, H., Kanda, N., Koinuma, H., Horiguchi, K., Kumagai, M., Hirai, K., Appl. Phys. Lett., 61, 2659 (1992)
Kawasaki, M., Takahashi, K., Maeda, T., Tsuchiya, R., Shinohara, M., Ishiyama, O., Yonezawa, T., Yoshimoto, M., Koinuma, H., Science 266, 1540 (1994).
The stepped substrates are commercially available from Shinko-sya Co., Ltd.
Yoshimoto, M., Maeda, T., Shimozono, K., Koinuma, H., Shinohara, M., Ishiyama, O., Ohtani, F., Appl. Phys. Lett., 65, 3197 (1994)
Yoshimoto, M., Maeda, T., Ohnishi, T., Koinuma, H., Ishiyama, O., Shinohara, M., Kubo, M., Miura, R., and Miyamoto, A., Appl. Phys. Lett. 67, 2615 (1995).
Kawasaki, M., Ohtomo, A., Takahashi, K., Yoshimoto, M., and Koinuma, H., Appl. Surf. Sci., in press.
Koinuma, H., Nagata, H., Tsukahara, T., Gonda, S., Yoshimoto, M.. Appl. Phys. Lett. 58, 2027 (1991).
Terashima, T., Bando, Y., Iijima, K., Yamamoto, K., Hirata, K., Kamigaki, K., and Terauchi, H.: Phys. Rev. Lett. 65, 2684 (1990).
Kawasaki, M., Kanda, N., Tsuchiya, R., Nakano, K., Ohtomo, A., Takahashi, K., Kubota, H., Shitraishi, T., and Koinuma, H., Advances in Superconductivity, 8, in press.
Koinuma, H., Yoshimoto, M., Nagata, H., and Tsukahara, T., Solid State Comn., 80, 9 (1991).
Yoshimoto, M., Nagata, H., Tsukahara, T. and Koinuma, H., Jpn. J. Appl. Phys., 29, L1199 (1990)
Lee, M. B., Kawasaki, M., Yoshimoto, M., Kumagai, M., and Koinuma, H., Jpn. J. Appl. Phys., 33, 6308 (1994).
Lee, M. B., Kawasaki, M., Yoshimoto, M., and Koinuma, H., Appl. Phys. Lett., 66, 1331 (1995).
Yoshimoto, M., Shimozono, K., Maeda, T., Ohnishi, T., Kumagai, M., Chikyow, T., Ishiyama, O., Shinohara, M., and Koinuma, H., Jpn. J. Appl. Phys., 34 (1995), L688.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed