Skip to main content Accessibility help
×
Home

Laser Growth of Thin Silicon Crystals in Patterned Structures

  • R. M. Fastow (a1), H. J. Leamy (a1), G. K. Celler (a1), Y. H. Wong (a1) and C. J. Doherty (a1)...

Abstract

Beam processing can be applied to thin, polycrystalline silicon films on amorphous substrates to: a( increase grain size, b( produce single, isolated crystals, and c( to produce oriented single crystals. Specific methods for these tasks are outlined. Crystal growth and heat flow consideration appropriate to each are presented.

Copyright

References

Hide All
1. Maurits, J. E. A., Solid State Techn., April 1977, p. 81.
2. Bean, K. E. and Runyan, W. R., J. Electrochem. Soc. 124, 5C, (1977).
3. Maserjian, J., Solid State Elect. 6, 477 (1963).
4. Kamins, T. I., Solid State Electronics 15, 789 (1972).
5. Shah, R. R., Lam, H.-W., Crosthwait, L., and Tasch, A. Jr. in: Laser and Electron Beam Processing of Electronic Materials eds: Anderson, C. L., Celler, G. K., and Rozgonyi, G. A. (The Electrochem. Soc., Princeton, N. J. 1980), pp. 235, 241.
6. Gat, A., Gerzberg, L., Gibbons, J. F., Magee, T. J., Peng, J., and Hong, J. D., Appl. Phys. Lett. 33, 775 (1978).
7. Bosch, M. A. and Lemons, R. A., this volume.
8. Celler, G. K., Leamy, H. J., Sheng, T. T., and Trimble, L. E., Appl. Phys. Lett., in press.
9. Kamins, T. I., Lee, K. F. and Gibbons, J. F., I.E.E.E. Electron Dev. Lett. EDL–1, 5 (1980).
10. Lee, K. F., Gibbons, J. F., Saraswat, K. C., and Kamins, T. I., Appl. Phys. Lett. 35, 173 (1979).
11. Lam, H. W., Tasch, A. F. Jr., Holloway, T. C., Lee, K. F., and Gibbons, J. F., I.E.E.E. Elect. Dev. Lett. EDL–1 99 (1980).
12. Barnard, J., Frey, J., Lee, K. F., and Gibbons, J. F., to be published.
13. Gibbons, J. F., Lee, K. F., Magee, T. J., Peng, J., and Ormond, R., Appl. Phys. Lett. 34, 831 (1980).
14. Kamins, T. I. and Pianetta, P. A., I.E.E.E. Elect. Dev. Lett. EDL–1, 214 (1980).
15. Lam, H. W., Tasch, A. F. Jr., and Holloway, T. C., I.E.E.E. Elect. Dev. Lett. EDL–1, 206 (1980).
16. Kuech, T. F. and McCaldin, J. O., Appl. Phys. Lett. 37, 44 (1980).
17. Gibbons, J. F. and Lee, K. F., I.E.E.E. Elect. Dev. Lett. EDL–1, 117 (1980).
18. Geis, M. W., Flanders, D. C., and Smith, H. I., Appl. Phys. Lett. 35, 71 (1979).
19. Leamy, H. J. and Doherty, C. J., Appl. Phys. Lett. 37, 1028 (1980).

Laser Growth of Thin Silicon Crystals in Patterned Structures

  • R. M. Fastow (a1), H. J. Leamy (a1), G. K. Celler (a1), Y. H. Wong (a1) and C. J. Doherty (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed