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Laser Densification of Sol-Gel Derived TiO2 - Thin Films.

Published online by Cambridge University Press:  25 February 2011

N. Arfsten ,
B. Lintner ,
M. Heming ,
O. Anderson  and
C. R. Otter-Mann
N. Arfsten
Affiliation:
SCHOTT Glaswerke, P.O.B. 2480, D-6500 Mainz, FRG
B. Lintner
Affiliation:
SCHOTT Glaswerke, P.O.B. 2480, D-6500 Mainz, FRG
M. Heming
Affiliation:
SCHOTT Glaswerke, P.O.B. 2480, D-6500 Mainz, FRG
O. Anderson
Affiliation:
SCHOTT Glaswerke, P.O.B. 2480, D-6500 Mainz, FRG
C. R. Otter-Mann
Affiliation:
SCHOTT Glaswerke, P.O.B. 2480, D-6500 Mainz, FRG
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Abstract

Laser substrate heating is discussed as an alternative for the densification of sol -gel thin films. Homogeneous films of n(550 nm) = 2.30 could be obtained, keeping the bulk substrate temperature below 80 °C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 271: Symposium N – Better Ceramics Through Chemistry V , 1992 , 449
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

[1] Dislich, H. in: Sol-gel technology for thin films, fibers, preforms, electronics, and specialty shapes. Klein, L. C., ed., Noyes Publ., 1988, Ch. 4.Google Scholar
[2] Arfsten, N., Piehlke, H., Huβmann, E.: DE 37 44 368, 1987.Google Scholar
[3] Schröder, H., in: Physics of Thin Films (Hass, G., ed.). 5, 87 (1969).Google Scholar
[4] Bach, H.. Glastechn. Ber. 56, 1 (1983);Google Scholar
Bach, H.. Glastechn. Ber. 56, 29 (1983).Google Scholar
[5] Buerhop, C., Blumenthal, B., Weissmann, R., Lutz, N. and Biermann, S.. Appl. Surf. Science 46, 430(1990).Google Scholar
[6] Cline, H. E., Anthony, T. R.. J. Appl. Phys. 48, 3895 (1977).CrossRefGoogle Scholar
[7] Toulonkian, Y. S., Powell, R. W., Ho, C. Y., Klemens, P. G., in: Thermophy-sical properties of materials, Plenum Press. Vol. 12, 922(1970).Google Scholar
[8] Bange, K., Ottermann, C. R., Anderson, O., Jeschkowski, U., Laube, M. and Feile, R.. Thin Solid Films. 197, 279 (1991)Google Scholar