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Laser Crystallization and Annealing of Ferroelectric Thin Films

  • J.S. Zhu (a1), X.M. Lu (a1), X. Liu (a1), W. Tian (a1), Z. Yang (a1) and Y.N. Wang (a1)...

Abstract

Ferroelectric PbZr0.44Ti0.56O3 film with pure ferroelectric phase was fabricated by Ar3+ and KrF laser crystallization technique from as-deposited amorphous films, with the substrate at room temperature. Laser annealing technique was also used to improve the quality of BaTiO3 (BT) films.

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1 Kumar, V., Sayer, M., Paseual, R., Amm, D.T., Wu, Z. and Swanston, M., Appl. Phys. Lett. 58, 1161 (1991)
2 Shi, L., Krupanidhi, S.B. and Haertling, G.H., Integrated Ferroelectrics 1, 111 (1992)
3 Kamins, T.I., Mater. Res. Soc. Proc. 33, 109 (1984)
4 Liu, Z.G, Liu, J.M. and Ming, N.B., J. Appl. Phys. 76, 8215 (1994)
5 Lu, X.M., Zhu, J.S., Huang, X.F. and Wang, Y.N., Appl. Phys. Lett. 65, 2015 (1994)
6 Lu, X.M., Zhu, J.S., Hu, W.S., Liu, Z.G. and Wang, Y.N., Appl. Phys. Lett. 66, 2481 (1995)
7 Lu, X.M., Zhu, J.S., Tian, W., Lu, M. and Wang, Y.N. Ferroelectrics 165, 339 (1995)
8 Lu, X.M., Zhu, J.S., Zhang, W.Y., Ma, G.Q. and Wang, Y.N. Thin Solid Films (in press)

Laser Crystallization and Annealing of Ferroelectric Thin Films

  • J.S. Zhu (a1), X.M. Lu (a1), X. Liu (a1), W. Tian (a1), Z. Yang (a1) and Y.N. Wang (a1)...

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