Skip to main content Accessibility help
×
Home

Laser Beam Lithography of Metal Oxide Electrodes for PZT Memory Applications

  • Jarrod L. Norton (a1), Said A. Mansour (a1), G. L. Liedl (a1), Arden L. Bement (a1), Elliott B. Slamovich (a1) and C. Venkatraman (a1)...

Abstract

Current metal/metal oxide patterning techniques typically involve photolithography, an expensive, time-consuming process, and/or a vacuum system, which also adds significantly to the cost. In this study, fabrication of metal oxide upper electrodes for Pb(ZrxTi1-x)O3 (PZT) memories by metallorganic decomposition (MOD) was coupled with laser beam patterning. Metal oxide organic precursors were treated with an absorption-enhancing dye and were spun on to ferroelectric PZT films followed by selective area laser beam exposure. This technique was employed to pattern RuO2 and (La,Sr)CoO3 electrodes. A variety of patterns (dot, line, and circular) were prepared which demonstrates the suitability of laser patterning for a variety of applications. The minimum power density required to generate a continuous conductive oxide pattern was found to be approximately 2.5 kW/cm2 at a scan speed of 25 mm/min. Resistivity values for the patterned lines were 660 Ω-cm for RuO2 and 59 mΩ-cm for LSCO.

Copyright

References

Hide All
1 Sands, T. (private communication).
2 Scott, J.F., Paz de Araujo, C.A., Science 76 (12), 1400 (1989).
3 Dhote, A.M., Patil, S.C., Kanetkar, S.M., Gangal, S.A., Ogale, S.B., J. Mater. Res 7 (7), 1685 (1992).
4 Hoffmann, P., Lecohier, B., Goldoni, S., Van Den Berge, H., Appl. Surface Science 43, 54 (1989).
5 Abell, T., M.S. Thesis, Purdue University, 1991.
6 Gifford, K.D., Auciello, O., Kingon, A.I., Integrated Ferroelectrics 7, 195 (1995).
7 Ramesh, R.. Gilchrist, H., Sands, T., Keramidas, V.G., Haakenaasen, R., Fork, D.K., Appl. Phys. Lett. 63, 3592 (1993).
8 Vest, R., Ferroelectrics 102, 53 (1990).
9 Aldrich Chemical Co, Inc., Product #19,819-6 Information Sheet

Laser Beam Lithography of Metal Oxide Electrodes for PZT Memory Applications

  • Jarrod L. Norton (a1), Said A. Mansour (a1), G. L. Liedl (a1), Arden L. Bement (a1), Elliott B. Slamovich (a1) and C. Venkatraman (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed