Skip to main content Accessibility help
×
Home

Laser Annealing of Te-Implanted III-V Semiconductors Studied by Mossbauer Spectroscopy

  • M. Van Rossum (a1), I. Dezsi (a1), G. Langouche (a1), J. De Bruyn (a1) and R. Coussement (a1)...

Abstract

The laser annealing behaviour of Te-implanted GaAs, GaSb, GaP and InP has been studied by Mössbauer Spectroscopy. The spectra of the as-implanted samples are characterized by a quadrupole split multiplet, showing that the Te ions come to rest at non-substitutional lattice sites. The laser annealing is shown to shift the implanted impurities towards substitutional positions. The efficiency of the laser annealing procedure is very similar for all lattices under study.

Copyright

References

Hide All
1. Weyer, G., Petersen, J.W., Damgaard, S., Nielsen, H.L. and Heinemeier, J., Phys. Rev. Lett. 44, 155 (1980).
2. Weyer, G., Damgaard, S., Petersen, J.W. and Heinemeier, J., J. Phys. C13, L181 (1980).
3. Golovchenko, J.A. and Venkatesan, T.N.C., Appl. Phys. Lett. 32, 147 (1978).
4. Pianetta, P.A., Stolte, C.A. and Hansen, J.L., to be published in Appl. Phys. Lett.
5. De bruyn, J., Coussement, R., Dézsi, I., Langouche, G. and Van Rossum, M., contribution to the “Vth International Conference on Hyperfine Interactions” Berlin July 1980.
6. Dézsi, I. et al. , to be published.
7. Shiu, B.K., Park, Y.S. and Ehret, J.E., in: Ion Implantation in Semiconductors 1976, Chernow, F., Borders, J.A. and Brice, D.K. eds. (Plenum Press, New York 1977) pp. 107.
8. Sealy, B.Y., Kular, S.S., Stephens, K.G., Sadana, D. and Booker, G.R., in: Proceedings of the International Conference on ion beam modification of materials, Gyulai, J., Lohner, T. and Pasztor, E. eds. (Budapest 1978) pp. 751.
9. De bruyn, J., Langouche, G., Van Rossum, M., de Potter, M. and Coussement, R., Phys. Lett. 73A, 356 (1979).

Laser Annealing of Te-Implanted III-V Semiconductors Studied by Mossbauer Spectroscopy

  • M. Van Rossum (a1), I. Dezsi (a1), G. Langouche (a1), J. De Bruyn (a1) and R. Coussement (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed