Skip to main content Accessibility help
×
Home

Large Area Pulsed Laser Deposition of YBCO Thin Films and Buffer Layers on 3-Inch Wafers

  • M. Lorenz (a1), H. Hochmuth (a1), H. Börner (a1), D. Natusch (a1) and K. Kreher (a1)...

Abstract

An arrangement for large area PLD on 3-inch wafers is proposed. In order to get a homogeneous stoichiometry and thickness distribution and small variations of superconducting properties on the 3-inch diameter, the substrate is foreseen to be rotated and additionally laterally moved up to 45 mm during deposition whereas the laser plume remains fixed.

YSZ buffer layers showed thickness homogeneity of 1% within 10 mm, of 4% within 2 inch and of 8% within 3 inch diameter, respectively. For in-situ deposited YBCO thin films on r-plane sapphire with YSZ buffer layer we inductively measured within 3 inch diameter values of the critical temperature Tc(90%) from 85.9 K to 86.7 K and values of the critical current density jc(77 K) from 1 × 106 to 2 × 106 A/cm2. However, up to now the degree of epitaxy of the YBCO thin films on r-plane sapphire with YSZ buffer layer is lower compared to YBCO on MgO(100) as determined by Raman spectroscopy. Nevertheless, large area PLD seems to be a very promising technique for homogeneous coating of 3-inch wafers by epitaxial oxide thin films.

Copyright

References

Hide All
[1] Utz, B., Kinder, H., in Proc. First European Conference on Applied Superconductivity, Göttingen, Germany, Oct. 4–9, 1993, p.609.
[2] Krüger, U., Kutzner, R., Wördenweber, R. et.al., Appl.Phys.Lett. 62, 1559 (1993).
[3] Foltyn, S.R, Muenchausen, R.E. et.al., Appl.Phys.Lett. 59, 1374 (1991).
[4] Tian, Y.J., Lu, H.B., Xu, S.F., Yang, G.Z. et.al., Physica C 220, 114 (1994).
[5] Hochmuth, H. and Lorenz, M., Physica C 220, 209 (1994).
[6] Lorenz, M., Börner, H., Hochmuth, H., Unger, K., Physica C 215, 445 (1993).
[7] Thomsen, C., Wegerer, R., Habermeier, H.U., Cardona, M., Solid State Commun. 83, 199 (1992).

Large Area Pulsed Laser Deposition of YBCO Thin Films and Buffer Layers on 3-Inch Wafers

  • M. Lorenz (a1), H. Hochmuth (a1), H. Börner (a1), D. Natusch (a1) and K. Kreher (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed