Skip to main content Accessibility help
×
Home

Large Area Depositions of Si/SiC Quantum Well Films for Thermoelectric Generator Applications

  • Tianhua Yu (a1), Harry Efstathiadis (a2), Richard Matyi (a3), Pradeep Haldar (a4), Saeid Ghamaty (a5) and Norbert Elsner (a6)...

Abstract

Recent development in thermoelectric conversion, especially in the area of quantum well (QW) thin film materials, have demonstrated the potential to achieve the high efficiency and power density to fabricate future power supplies. In this study, we develop the large area QW films of N-type Si/SiC integrated with P-type B4C/B9C, which can be used as thermoelectric devices for waste heat recovery. The approach is to fabricate thick large area film stacks (up to 11 μm) deposited by sputter deposition technique on 6” n-type (100) silicon substrates, which might be proven to be a suitable method for potentially manufacturing large area thermoelectric devices in a cost effective manner. These more basic studies are being carried out to better understand variables such as film thickness, deposition rate and other important parameters of these ∼10 nm films. The resulting as deposited and annealed multilayer stacks were characterized in terms of thin film uniformity, thickness, growth rate, composition, and thermoelectric performance, by Spectroreflectometry, atomic force microscopy (AFM), Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), X-ray reflectivity (XRR), and electrical measurements. Issues, which could cause film stack degradation, such as interface layer formation, film delamination, and crack formation lowering the device performance will be presented and correlated to device efficiency.

Copyright

References

Hide All
1. Nan, C.W., Wu, J., Nan, J., and Zhou, X. S., “Multiscale approaches to thermoelectric materials and devices”, 20th international conference on thermoelectrics, 2001.
2. Goldsmid, H. J., Thermoelectric refrigeration, Plenum Press, New York, 1964.
3. Bass, J., Elsner, N., Ghamaty, S., Jovanovic, V., and Krommenhoek, D., “High efficiency quantum well thermoelectrics for waste heat power generation”, presentation of Hi-Z Inc, 2004.
4. Chen, G., “Nanoscale heat transfer and information technology”, Rohsenow symposium on future trends of heat transfer, 2003.
5. Venkatasubramanian, R., Siivola, E., Colpitts, T., “Thin-film thermoelectric devices with high room-temperature figures of merit”, Nature, 2001.
6. Harman, T. C, “Quantum dot superlattice materials and devices”, Science, 297, 2002.
7. Chen, G., “Nanoscale heat transfer and nanostructured thermoelectrics”, Inter society conference on thermal phenomenon, 2004.
8. Dresselhaus, M. S., “Nanostructures and Energy Conversion”, Rohsenow symposium on future trends of heat transfer, (2003).
9. Ghamaty, S. and Elsner, N. B., Thermoelectric and electrical properties of Si/Si0.8Ge0.2 and B4C/B9C films', Proceedings of 17th Intl. conference on thermoelectrics, 1998.
10. Aleksandr, S., Kushch, J., Bass, J., Ghamaty, S. and Elsner, N. B.. “Thermoelectric development at Hi-Z technology”, DEER workshop, 2001.
11. Ghamaty, S., Elsner, N. B.,. and Bass, J.; “Thermoelectric module with Si/SiC and B4C/B9C super-lattice legs' United States Patent Application 20050028857.
12. Kojima, I. and Li, B., “structural characterization of thin films by x-ray reflectivity”, The Rigaku Journal, 1999.

Keywords

Related content

Powered by UNSILO

Large Area Depositions of Si/SiC Quantum Well Films for Thermoelectric Generator Applications

  • Tianhua Yu (a1), Harry Efstathiadis (a2), Richard Matyi (a3), Pradeep Haldar (a4), Saeid Ghamaty (a5) and Norbert Elsner (a6)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.