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KrF Excimer Laser Direct Writing of Titanium Lines: Modeling and Application to the Fabrication of Ti:Linbo3 Waveguides

  • M. Meunier (a1), C. Lavoie (a1), S. Boivin (a1), R. Izquierdo (a1), P. Desjardins (a1) and S. I. Najafi (a1)...

Abstract

The deposition of titanium lines by KrF excimer laser direct writing on lithium niobate (LiNbO3) has been investigated. A detailled study of the line profile has been performed since this is critical in the fabrication of Ti:LiNbO3 optical waveguides. We show that at a low power density E, the maximum thickness t is proportional to E, while increasing E leads to the diffusion of Ti into LiNbO3 resulting in a saturation and even a decrease in thickness. Preliminary results on Ti:LiNbO3 optical waveguides show that their characteristics are similar to those made by conventional methods.

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[1] Izquierdo, R., Lavoie, C. and Meunier, M..MRS Symp. Proc., 158, 141 (1990).
[2] Izquierdo, R., Lavoie, C. and Meunier, M., Appl. Phys. Lett. 57, 647 (1990).
[3] Tsao, J.Y., Becker, R.A., Ehrlich, D.J. and Leoneberger, F.J., Appl. Phys. Lett. 42, 559 (1983).
[4] Boivin, S., Lavoie, C., Izquierdo, R., Najafi, S.I. and Meunier, M., IEEE Proc. (To be published).
[5] Lavoie, C., Master thesis, Ecole Polytechnique de Montréal, 1990.
[6] Lavoie, C., Meunier, M., Izquierdo, R., Boivin, S. and Desjardins, P., submitted to Journal of Applied Physics.
[7] Lavoie, C., Meunier, M., Boivin, S., Izquierdo, R. and Desjardins, P., submitted to Journal of Applied Physics.
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KrF Excimer Laser Direct Writing of Titanium Lines: Modeling and Application to the Fabrication of Ti:Linbo3 Waveguides

  • M. Meunier (a1), C. Lavoie (a1), S. Boivin (a1), R. Izquierdo (a1), P. Desjardins (a1) and S. I. Najafi (a1)...

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