Skip to main content Accessibility help
×
Home

Ion Beams for synthesis and modification of nanostructures in semiconductors

  • Anand P. Pathak, N. Srinivasa Rao (a1), G. Devaraju (a1), V. Saikiran (a1) and S. V. S. Nageswara Rao (a1)...

Abstract

Swift heavy ion irradiation is one of the most versatile techniques to alter and monitor the properties of materials in general and at nanoscale in particular. The materials modification can be controlled by a suitable choice of ion beam parameters such as ion species, fluence and incident energy. It is also possible to choose these ion beam parameters in such a way that ion beam irradiation can cause annealing of defects or creation of defects at a particular depth. Here, we present a review of our work on swift heavy ion induced modifications of III-V semiconductor heterostructures and multi-quantum wells in addition to synthesis of Ge nanocrystals using atom beam co-sputtering, RF magnetron sputtering followed by RTA, swift heavy ion irradiation, respectively. We also present the growth of GeO2 nanocrystals by microwave annealing. These samples were studied by using XRD, Raman, PL, RBS and TEM. The observed results and their explanation using possible mechanisms are discussed in detail.

Copyright

Corresponding author

*Corresponding author. Tel.: +91 40 23010181/23134316; fax: +91 40 23010181/23010227. E-mail address: appsp@uohyd.ernet.in (A.P. Pathak).

References

Hide All
1. Semiconductors and Semimetals, Vo. 33, Ed. Pearsal, T. P., Acadmic Press, New York (1991) and ref there in.
2. Drigo, A.V., Aydinli, A., Carnera, A., Genova, F., Rigo, C., Ferrari, C., Fanzosi, P., Saviati, G., J. Appl. Phys. 86, 1975 (1989).10.1063/1.344335
3. Tersoff, J., Appl. Phys. Lett. 65, 2460 (1993).
4. Araujo, D., Gonzalez, D., Garcia, R., Sacedon, A., Calleja, E., Appl.Phys. Lett. 67, 3632 (1995).10.1063/1.115341
5. Mathews, J.W., Blakeslee, A.E., J. Cryst. Growth 27, 118 (1974).
6. Fritz, I.J., Picraux, S.T., Dawson, L.R., Drummond, T.J., Lsidig, W.D., Anderson, N.G., Appl. Phys. Lett. 46, 987(1985).10.1063/1.95783
7. Dhamodaran, S., Sathish, N., Pathak, A.P., Avasthi, D.K., Muralidharan, R., Sundaravel, B., Nair, K.G.M., Sridhara Rao, D.V., Muraleedharan, K. and Emfietzoglou, D., Nucl. Inst. Meth. B, 254, 283 (2007).10.1016/j.nimb.2006.10.075
8. Dhamodaran, S., Pathak, A.P., Turos, A., Kesavamoorthy, R., Sundaravel, B., Nair, K.G.M. and Arora, B.M., Nucl. Inst. Meth. B, 266, 1908 (2008).10.1016/j.nimb.2007.12.087
9. Dhamodaran, S., Pathak, A.P., Turos, A., Sai Saravanan, G, Khan, S.A., Avasthi, D.K. and Arora, B.M., Nucl. Inst. Meth. B, 266, 583 (2008).10.1016/j.nimb.2007.11.073
10. Kucheyev, S.O., Williams, J.S., Pearton, S., J. Mater. Sci. Eng. R. 33, 51 (2001).10.1016/S0927-796X(01)00028-6
11. Kucheyev, S.O., Timmers Zou, H.J., Williams, J.S., Jagadish, C., Li, G., J. Appl. Phys. 95, 5360 (2004).10.1063/1.1703826
12. Jiang, W., Weber, W.J., Wang, M., Sun, K., Nucl. Inst. Meth. B 218, 427 (2004).10.1016/j.nimb.2003.12.012
13. Suresh Kumar, V., Kumar, J., Kanjilal, D., Asokan, K., Mohanty, T., Tripathi, A., Rossi, Francisca, Zappettini, A., Lazzarani, L., Nucl. Inst. Meth. B 266, 1799 (2008).10.1016/j.nimb.2008.01.070
14. Bolse, W. and Schattat, B., Nucl. Inst. Meth. B 190, 173 (2002).10.1016/S0168-583X(01)01225-3
15. Sathish, N, Pathak, A P, Dhamodaran, S, Sundaravel, B, Nair, K G M, Khan, S A, Avasthi, D K, Bazzan, M. Trave, E., Mazzoldi, P., Radiation Effects and Defects in Solids. (In Press)
16. Devaraju, G., Sathish, N., Pathak, A.P., Turos, A., Bazzan, M., Trave, E., Mazzoldi, P. and Arora, B.M., Nucl. Inst. Meth. B 268, 3001 (2010).10.1016/j.nimb.2010.05.027
17. Caldelas, P., Rolo, A.G., Chahboun A, A., Foss, S., Levichev, S., Finstad, T.G., Gomes, M.J.M., Conde, O. J. Nanosci. Nanotechnol. 8, 572 (2008).10.1166/jnn.2008.A186
18. Zacharias, M., Fauchet, P.M., J. Non-Cryst. Solids, 227230, 1058 (1998).10.1016/S0022-3093(98)00241-5
19. Mestanza, S.N.M., Rodriguez, E., Frateschi, N.C., Nanotechnology 17, 4548 (2006).10.1088/0957-4484/17/18/004
20. Srinivasa Rao, N., Pathak, A.P., Sathish, N., Devaraju, G., Saikiran, V., Kulriya, P.K., Agarwal, D.C., Sai Saravanan, G. and Avasthi, D.K., Solid State Communications 150, 2122 (2010).10.1016/j.ssc.2010.09.014
21. Srinivasa Rao, N., Dhamodaran, S., Pathak, A.P., Kulriya, P.K., Mishra, Y.K., Singh, F., Kabiraj, D., Pivin, J.C. and Avasthi, D.K., Nucl. Inst. Meth B 264, 249 (2007).10.1016/j.nimb.2007.08.094
22. Srinivasa Rao, N., Pathak, A.P., Sathish, N., Devaraju, G., Khan, S.A., Saravanan, K., Panigrahi, B.K., Nair, K.G.M. and Avasthi, D.K., Nucl. Inst. Meth. B 268, 1741(2010).
23. Srinivasa Rao, N., Pathak, A.P., Devaraju, G. and Saikiran, V., Vacuum, 85, 927 (2011).10.1016/j.vacuum.2011.01.012
24. Saikiran, V., Srinivasa Rao, N. Devaraju, G. and Pathak, A. P, AIP conference proceedings, 1336, 264 (2011).10.1063/1.3586101
25. Nageswara Rao, S.V.S., Rajam, A. K., Siddiqui, Azher M., Avasthi, D. K., Srinivasan, T., Tiwari, Umesh, Mehta, S. K., Muralidharan, R., Jain, R. K. and Pathak, Anand P.. Nucl. Inst. Meth. B 212, 473 (2003).10.1016/S0168-583X(03)01458-7
26. Islam, M R, Verma, P, Yamada, M, Kodama, S, Hanaue, Y and Kinoshita, K Mater. Sci. Eng. B 91/92, 66 (2002).10.1016/S0921-5107(01)00972-2
27. Olego, D J, Shahzad, K, Petruzzello, J and Cammack, D Phys. Rev. B 36, 7674 (1987).10.1103/PhysRevB.36.7674
28. Brafman, O, Fekete, D and Sarfaty, R Appl. Phys. Lett. 58, 400 (1991).10.1063/1.104647
29. Burns, G, Wie, C R, Dacol, F H, Pettit, G D and Woodall, J M Appl. Phys. Lett. 51, 1919 (1987).10.1063/1.98300
30. Dhamodaran, S., Sathish, N., Pathak, A.P., Khan, S.A., Avasthi, D.K., Srinivasan, T., Muralidharan, R. and Arora, B.M., Nucl. Inst. Meth. B, 256, 260 (2007).10.1016/j.nimb.2006.12.011
31. Dhamodaran, S, Sathish, N, Pathak, A P, Khan, S A, Avasthi, D K, Srinivasan, T, Muralidharan, R, Kesavamoorthy, R and Emfietzoglou, D, J. Phys. Condens. Matter 18, 4135 (2006).10.1088/0953-8984/18/17/003
32. Manasreh, M.O., Phys. Rev. B 53, 16425 (1996).10.1103/PhysRevB.53.16425
33. Balagurov, L. and Chong, P.J., Appl. Phys. Lett. 68, 43 (1996).10.1063/1.116750
34. Rieger, W., Dimitrov, R., Brunner, D., Rohrer, E., Ambacher, O. and Stutzmann, M., Phys. Rev. B 54, 17596 (1996).10.1103/PhysRevB.54.17596
35. Sathish, N., Dhamodaran, S., Pathak, A.P., Ghanashyam Krishna, M., Khan, S.A., Avasthi, D.K., Pandey, A., Muralidharan, R., Li, G. and Jagadish, C. Nucl. Inst. Meth. B 256, 281 (2007).10.1016/j.nimb.2006.12.060
36. Devaraju, G., Dhamodaran, S., Pathak, A.P., Sai Saravanan, G., Gaca, J., Wojcik, M., Turos, A., Khan, S.A., Avasthi, D.K. and Arora, B.M. Nucl. Inst. Meth. B 266, 3552 (2008).10.1016/j.nimb.2008.05.151
37. Wu, X.M., Lu, M.J. and Yao, W.G. Surf. Coat. Technol. 161, 92 (2002).10.1016/S0257-8972(02)00343-2
38. Lu, M.J., Wu, X.M. and Yao, W.G. Mater. Sci. Eng. B 100, 152 (2003).10.1016/S0921-5107(03)00090-4
39. Kanakaraju, S, Sood, A K and Mohan, S Curr. Sci. 80, 1550 (2001).
40. Fauchet, P.M. and Campbell, I.H., Crit. Rev. Solid State Mater. Sci. 14 S79 (1988).10.1080/10408438808244783
41. Sasaki, Y. and Horie, C., Phys. Rev. B 47, 3811(1993)10.1103/PhysRevB.47.3811
42. Orekhov, D. A., Volodin, V. A., Efremov, M. D., Nikiforov, A. I., Ul’yanov, V. V., and Pchelyakov, O. P., Journal of Experimental and Theoretical Physics Letters, 81,331 (2005).10.1134/1.1944073
43. Toulemonde, M., Dufour, C. and Paumier, E., Phys. Rev. B 46, 14362 (1992).10.1103/PhysRevB.46.14362
44. Meftah, , Brisard, F. Costantini, M., Dooryhee, E., Hage-Ali, M., Hervieu, M., Stoquert, J. P., Studer, F. and Toulemonde, M. Phys. Rev. B 49, 12457 (1994).10.1103/PhysRevB.49.12457
45. Toulemonde, M., Costantini, J. M., Dufour, Ch., Meftah, A., Paumier, E. and Studer, F., Nucl. Inst. Meth. B 116, 37(1996).10.1016/0168-583X(96)00007-9
46. Srinivasa Rao, N, Pathak, A.P., Sathish, N., Devaraju, G. and Saikiran, V. AIP Conf. Proc. 1336, 341 (2011).
47. Asmar, R.A., Atnas, J.P., Ajaka, M., Zaatar, Y., Ferblantier, G., Sauvajol, J.L., Jabbour, J., Juillaget, S. and Foucaran, A., J. Cryst. Growth 279, 394 (2005).10.1016/j.jcrysgro.2005.02.035
48. Kartopu, G., Bayliss, S.C., Karavanskii, V.A., Curry, R.J., Turan, R. and Sapelkin, A.V., J. Lumin. 101, 275 (2003).10.1016/S0022-2313(02)00570-7

Keywords

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed