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Ion Beam Sputter Deposition Of Ferroelectric Oxide Thin Films

  • Thomas M. Graettinger (a1), O. Auciello (a1) (a2), M. S. Ameen (a1) (a3), H. N. Al-Shareef (a1), K. Gifford (a1) and A. I. Kingon (a1)...

Abstract

Ferroelectric oxide films have been studied for their potential application as integrated optical materials and nonvolatile memories. Electro-optic properties of potassium niobate (KNbO3) thin films have been measured and the results correlated to the microstructures observed. The growth parameters necessary to obtain single phase perovskite lead zirconate titanate (PZT) thin films are discussed. Hysteresis and fatigue measurements of the PZT films were performed to determine their characteristics for potential memory devices.

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Ion Beam Sputter Deposition Of Ferroelectric Oxide Thin Films

  • Thomas M. Graettinger (a1), O. Auciello (a1) (a2), M. S. Ameen (a1) (a3), H. N. Al-Shareef (a1), K. Gifford (a1) and A. I. Kingon (a1)...

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