Hostname: page-component-76fb5796d-r6qrq Total loading time: 0 Render date: 2024-04-27T02:14:15.148Z Has data issue: false hasContentIssue false
  • English
  • Français

Ion Beam Sputter Deposition Of Ferroelectric Oxide Thin Films

Published online by Cambridge University Press:  16 February 2011

Thomas M. Graettinger ,
O. Auciello ,
M. S. Ameen ,
H. N. Al-Shareef ,
K. Gifford  and
A. I. Kingon
Thomas M. Graettinger
Affiliation:
North Carolina State University, Raleigh, NC 27695-7919.
O. Auciello
Affiliation:
North Carolina State University, Raleigh, NC 27695-7919. Microelectronics Center of North Carolina, Research Triangle Park, NC 27709-2889.
M. S. Ameen
Affiliation:
North Carolina State University, Raleigh, NC 27695-7919. Present Address: Materials Research Corporation, Orangeburg, NY 10962.
H. N. Al-Shareef
Affiliation:
North Carolina State University, Raleigh, NC 27695-7919.
K. Gifford
Affiliation:
North Carolina State University, Raleigh, NC 27695-7919.
A. I. Kingon
Affiliation:
North Carolina State University, Raleigh, NC 27695-7919.
Get access

Abstract

Ferroelectric oxide films have been studied for their potential application as integrated optical materials and nonvolatile memories. Electro-optic properties of potassium niobate (KNbO3) thin films have been measured and the results correlated to the microstructures observed. The growth parameters necessary to obtain single phase perovskite lead zirconate titanate (PZT) thin films are discussed. Hysteresis and fatigue measurements of the PZT films were performed to determine their characteristics for potential memory devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 223: Symposium E – Low Energy Ion Beam and Plasma Modification of Materials , 1991 , 273
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Tuttle, B. A., MRS Bulletin Oct./Nov. 40, 40–45 (1987).Google Scholar
2. Holman, R. L., Johnson, L. M. A., and Skinner, D. P., in Proceedings of the 6th IEEE Symp. on the Applications of Ferroelectrics (IEEE, New York, 1986), pp. 32–40.Google Scholar
3. Graettinger, T. M., Rou, S. H., Ameen, M. S., Auciello, O., and Kingon, A. I., Appl. Phys. Lett. 58(18), 1964–1966 (1991).Google Scholar
4. Krauss, A. R., Auciello, O., Kingon, A. I., Ameen, M. S., Liu, Y. L., Barr, T., Graettinger, T. M., Rou, S. H., Soble, C. N., and Gruen, D. M., Appl. Surf. Science 46, 67 (1990)Google Scholar
5. Auciello, O., Ameen, M. S., Krauss, A. R., Kingon, A. I., and Ray, M. A. in Beam-Solid Interactions: Physical Phenomena, edited by Knapp, J. A., Borgesen, P., and Zuhr, R. A. (Mater. Res. Soc. Proc. 157, Pittsburgh, PA 1990) pp. 287–292.Google Scholar
6. Rou, S. H., Hren, P. D., Hren, J. J., Graettinger, T. M., Ameen, M. S., Auciello, O., and Kingon, A. I. in High Resolution Electron Microscopy of Defects in Materials, edited by Sinclair, R., Smith, D. J., and Dahmen, U. (Meter. Res. Soc. Proc. 183, Pittsburgh, PA 1990) pp. 285–290.Google Scholar
7. Rou, S. H., Hren, J. J., Hren, P. D., Graettinger, T. M., Ameen, M. S., Auciello, O., and Kingon, A. I. in Electron Microscopy 1990: Proceedings of the XIIth International Conress for Electron Microscopy. Vol. 4: Material Sciences (San Francisco Press, San Francisco, 1990) pp. 466–467.Google Scholar
8. Rou, S. H., PhD Thesis, North Carolina State University, 1991.Google Scholar
9. Rou, S. H., presented at the 1991 MRS Spring Meeting, Los Angeles, CA, 1991 (to be published in MRS symposium proceedings).Google Scholar
10. Adachi, H., Kawaguchi, T., Setsune, K., Ohji, K., and Wasa, K., Appl. Phys. Lett. 42(10), 867–868 (1983).Google Scholar
11. Wu, A., Wang, F., Bustamante, C. in Ferroelectric Thin Films, edited by Meyers, E. R. and Kingon, A. I. (Mater. Res. Soc. Proc. 200, Pittsburgh, PA 1990) pp. 261–266.Google Scholar
12. Adachi, H., Mitsuyu, T., Yamazaki, O., and Wasa, K., J, Appl. Phys. 60(2), 736–741 (1986).Google Scholar
13. Hren, P. D., presented at the International Symposium on Integrated Ferroelectrics, Colorado Springs, CO, 1991 (to be published in Ferroelectrics).Google Scholar
14. AI-Shareef, H. N., presented at the American Ceramic Society 93rd Annual Meeting, Cincinnati, OH, 1991 (to be published in Ceramic Transactions).Google Scholar
15. Lichtenwalner, D. J. (submitted to the J. Appl. Phys., May 1991).Google Scholar