Hostname: page-component-8448b6f56d-jr42d Total loading time: 0 Render date: 2024-04-19T22:21:24.756Z Has data issue: false hasContentIssue false
  • English
  • Français

Investigation of Titanium Nitride Synthesized by Ion Beam Enhanced Deposition

Published online by Cambridge University Press:  25 February 2011

Zhou Jiankun ,
Liu Xianghuai ,
Chen Youshan ,
Zheng Zhihong ,
Huang Wei ,
Zhou Zuyao  and
Zou Shichang
Zhou Jiankun
Affiliation:
Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
Liu Xianghuai
Affiliation:
Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
Chen Youshan
Affiliation:
Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
Zheng Zhihong
Affiliation:
Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
Huang Wei
Affiliation:
Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
Zhou Zuyao
Affiliation:
Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
Zou Shichang
Affiliation:
Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
Get access

Abstract

Titanium nitride films have been synthesized at room temperature by alternate deposition of titanium and bombardment by nitrogen ions with an energy of 40KeV. The component depth profiles and the structure of titanium nitride films were investigated by means of RBS, AES, TEM, XPS and X-ray diffraction. The results showed that titanium nitride films formed by ion beam enhanced deposition (IBED) had columnar structure and were mainly composed of TiN crystallites with random orientation. The oxygen contamination in titanium nitride films prepared by IBED was less than that of the deposited film without nitrogen ion bombardment. It was confirmed that a significant intermixed layer exists at the interface. The thickness of this layer was about 40 nm for the film prepared on iron plate. The mechanical properties of the film have been investigated. The films formed by IBED exhibited high hardness, improved wear resistance and low friction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 128: Symposium A – Processing and Characterization of Materials Using Ion Beams , 1988 , 73
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Alina, W., Erdemir, A., and Hochman, R.F., in Ion Plating and Implantation, edited by Hochman, R.F. (American Society for Metals, 1986) pp.169–172; E.I. Meletis, A. Erdemir, and R.F. Hochman, Ion Plating and Implantation, edited by R.F. Hochman (American Society for Metals, 1986), pp.173–178.Google Scholar
2. Rossnagel, S.M. and Cuomo, J.J., MRS Bulletin, 16, 40 (1987).10.1557/S0883769400068391CrossRefGoogle Scholar
3. Harper, J.M.E., Cuomo, J.J., Gambina, R.J. and Kaufman, H.R., Nucl. Instrum. Meth. Phys. Res. B7/8, 886 (1985).10.1016/0168-583X(85)90489-6CrossRefGoogle Scholar
4. Kant, R.A., Sartwell, B.D., Singer, I.L. and Vardiman, R.G., Nucl. Instrum. Meth. Phys. Res. B7/8, 915 (1985).10.1016/0168-583X(85)90494-XCrossRefGoogle Scholar
5. Sartwell, B.D., in Ion Plating and Implantation, edited by Hochman, R.F. (American Soceity for Metals, 1986), pp. 81–89.Google Scholar
6. Kiuchi, M., Tomita, M., Fujii, K., Satou, M. and Shimizu, R., Japanese J. Appl. Phys., 26, 98 (1987); M. Satou, Y. Andoh, K. Ogata, Y. Suzuki, K. Matsuda and F. Fujimoto, Japanese J. Appl. Phys., 24, 656 (1985).10.1143/JJAP.26.L938CrossRefGoogle Scholar
7. xianghuai, Liu, Bin, Xue, Zhihong, Zheng, Zuyao, Zhou and Shichang, Zou, to be published in Nucl. Instrum. Meth. Phys. Res. B.Google Scholar
8. Dawson, P.T. and Tzatzov, K.K., Surface Science, 149, 105 (1985).10.1016/S0039-6028(85)80016-9CrossRefGoogle Scholar