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Interface Structure of Ge/Si Superlattices Determined by X-Ray Absorption Fine Structure

  • P. Aebi (a1), T. Tyliszczak (a1), A. P. Hitchcock (a1), J. -M. Baribeau (a2), D. J. Lockwood (a2) and T. E. Jackman (a2)...

Abstract

We illustrate the usefulness of the Extended X-ray Absorption Fine Structure (EXAFS) technique to determine the amount of interface mixing and strain condition in the study of (SimGen)p short-period superlattices. It is found that for n < 4, the number of Ge and Si nearest neighbours to Ge atoms is consistent with ∼25% interfacial mixing and that the Ge-Ge bond length corresponds to that of coherently strained Ge. The Si-Ge bond length is shorter, close to that of a strained Si0.25Ge0.75 alloy. For n > 4, the Ge-Ge bond length and the number of Si-Ge nearest neighbours increase significantly consistent with partial relaxation and interdiffusion. Raman scattering spectroscopy and x-ray reflectometry measurements are also presented and are consistent with the conclusions of the EXAFS analysis.

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1- Froyen, S., Wood, D. M., Zunger, A., Phys. Rev. B 36 (1987) 4547, Phys. Rev. B 37, 6893 (1988).
2- Miki, K., Sakamoto, K. and Sakamoto, T., Mat. Res. Soc. Symp. Proc. Vol. 148, 323 (1989).
3- Eaglesham, D. J. and Cerullo, M., Phys. Rev. Lett. 64, 1943 (1990).
4- Narusawa, T. and Gibson, W. M., Phys. Rev. Lett. 47, 1459 (1981).
5- Williams, A. A., Thornton, J. M. C., Macdonald, J. E., van Silfhout, R. G., van der Veen, J. F., Finney, M. S., Johnson, A. D. and Norris, C., Phys. Rev. B43, 5001 (1991).
6- Baribeau, J. -M., Pascual, R., Saimoto, S., Appl. Phys. Lett. 57, 1502 (1990).
7- Ourmazd, A. and Bean, J. C., Phys. Rev. Lett. 55, 765 (1985).
8- Lockwood, D. J., Rajan, K., Fenton, E. W., Baribeau, J. -M. and Denhoff, M. W. Solid State Commun. 61, 465 (1987).
9- LeGoues, F. K., Kesan, V. P. and Iyer, S. S., Phys Rev. Lett. 64, 40 (1990).
10- LeGoues, F. K., Kesan, V. P., Iyer, S. S., Tersoff, J. and Tromp, R., Phys Rev. Lett. 64, 2038 (1990).
11- Müller, E., Nissen, H. -U., Ospelt, M. and von Känel, H., Phys. Rev. Lett. 63, 1819 (1989).
12- Jesson, D. E., Pennycook, S. J. and Baribeau, J. -M., Phys. Rev. Lett. 66, 750 (1991).
13- Baribeau, J. M., Jackman, T. E., Maigné, P., Houghton, D. C. and Denhoff, M. W., J. Vac. Sci. Technol. A 5, 1898 (1987).
14- Baribeau, J. -M., Lockwood, D. J., Dharma-wardana, M. W. C., Rowell, N. L. and McCaffrey, J. P., Thin Solid Films 183 (1989).
15- Lockwood, D. J., SPIE Proc. 1336, 13 (1990).
16- Dharma-wardana, M. W. C., Aers, G. C., Lockwood, D. J. and Baribeau, J. -M., Phys. Rev. B 41, 5319 (1990).
17- Lockwood, D. J. and Baribeau, J. -M., in ‘Light Scattering in Semiconductors Structures and Superlattices’, Edited by Lockwood, D. J. and Young, J. F. (Plenum, New York, 1991).
18- Lockwood, D. J., Dharma-wardana, M. W. C., Baribeau, J. -M. and Houghton, D. C., Phys. Rev. B 35, 2243 (1987).
19- Spiller, E., Rosenbluth, A. E., Opt. Eng. 25, 954 (1986).
20- Baynes, K., Sham, T. E., Chen, J. M. and Yang, B. X. (to be published).
21- Oyanagi, H., Sakamoto, T., Sakamoto, K., Matsushita, T., Yao, T. and Ishiguro, T., J. Phys. Soc. Japan 57, 2086 (1988).
22- Woicik, J. C., Bouldin, C. E., Bell, M. I., Cross, J. O., Tweet, D. J., Swanson, B. D., Zhang, T. M., Sorensen, I. B., King, C. A., Hoyt, J. L., Pianetta, P. and Gibbons, J. F., Phys. Rev. B43, 2419 (1991).
23- Tyliszczak, T. and Hitchcock, A. P., Physica 158, 335 (1989).
24- Tyliszczak, T., Hitchcock, A. P. and Jackman, T. E., J. Vac. Sci. Technol. A8, 2020 (1990).
25- Baribeau, J. -M., Lockwood, D. J., Jackman, T. E., Aebi, P., Tyliszczak, T. and Hitchcock, A. P., Can. J. Phys. in press.
26- Aebi, P., Tyliszczak, T., Hitchcock, A. P., Jackman, T. E. and Baribeau, J. -M., J. Vac. Sci. Technol. in press.
27- Software available from TOLMAR Inc; Tyliszczak, T., Aebi, P., Hitchcock, A. P. and Jackman, T. E., unpublished.
28- Jackman, T. E., Baribeau, J. -M., Lockwood, D. J., Aebi, P., Tyliszczak, T. and Hitchcock, A. P., Phys. Rev B, (in preparation).

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