Highly oriented YBCO films were produced on MgO(100) single crystal substrates. The direction of c axis was perpendicular to the film plane, whereas those of a and b axes were at random directions. The critical current density of the films was significantly high ca. 7x105 A/cm2. The critical transition temperature (Tc) of the YBCO film formed on a metal substrate, predeposited with YSZ as a buffer layer, was similar to those of the YBCO on MgO substrate. The possibility for the formation of superconductor films on metal substrates is suggested from these results.