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In-Situ Plume Diagnosis During Pulsed Laser Deposition of Epitaxial-Oxide Thin Films

Published online by Cambridge University Press:  15 February 2011

David B. Fenner ,
Pang-Jen Kung ,
Jörn Gores  and
Qi Li
David B. Fenner
Affiliation:
AFR Inc, 87 Church Street, East Hartford, CT 06108
Pang-Jen Kung
Affiliation:
AFR Inc, 87 Church Street, East Hartford, CT 06108
Jörn Gores
Affiliation:
AFR Inc, 87 Church Street, East Hartford, CT 06108
Qi Li
Affiliation:
Applied Materials, 3320 Scott Blvd., Santa Clara, CA 95054
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Abstract

The visible plume, induced during pulsed-laser deposition (PLD) of epitaxial La0.5.jSr0.5 5CoO3/Ba0.4Sr0.6TiO3/La0.5Sr05CoO3/YBa2Cu3O7/YSZ heterostructures on silicon (100) wafers, was studied by optical-emission spectroscopy (OES). These films are suitable for the fabrication of ferroelectric capacitors and pyroelectric-sensor devices. A YAG laser, at 266 nm, is used for ablation. A collection lens transfers the PLD-plume emission into an optical fiber and onto a diffraction grating and a CCD array, for time-averaged spectroscopy from 410 to 640 nm. Plume emissions from ablated targets in the presence of an oxygen ambient, due to various atomic (Ba, Co, Cu, Sr, Ti, Y, Zr), ionic (Ba+, La+, Sr+, Y+), and a diatomic oxide (YO) species were identified. Emission intensity and evolution of ablated species are reported for distance away from the target surface, oxygen pressures, and laser fluences (1 to 4 J/cm2). The behavior of reactive-product species, especially YO for plumes from yttria-stabilized zirconia (YSZ) and YBCO targets, is discussed. This simple and inexpensive OES system is suitable for use as a plume-quality monitor on routine PLD film synthesis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 163
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

Geohegan, D. B., in Pulsed Laser Deposition of Thin Films, edited by Chrisey, D. B. and Hubler, G.K. (J. Wiley, 1994) pp. 115–165.Google Scholar
Wu, X.D., Dutta, B., Hegde, M.S., Inam, A., Venkatesan, T., Chase, E. W., Chang, C.C., and Howard, R., Appl. Phys. Lett. 54, 179 (1989).Google Scholar
Geyer, T. and Weimer, W. A., Appl. Phys. Lett. 54, 469 (1989).Google Scholar
Yoo, K.M., Alfano, R.R., Guo, X., Sarachik, M.P., and Isaacs, L.L., Appl. Phys. Lett. 54, 1278 (1989).Google Scholar
Girault, C., Damiani, D., Aubreton, J. and Catherinot, A., Appl. Phys. Lett. 54, 2035 (1989);Google Scholar
Girault, C., Damiani, D., Aubreton, J. and Catherinot, A., Appl. Phys. Lett. 55, 182 (1989).Google Scholar
Fried, D., Reck, G.P., Kushida, T., and Rothe, E.W., J. Appl. Phys. 70, 2337 (1991).Google Scholar
D. Fried, , T. Kushida, , G.P. Reck, , and E.W. Rothe, , J. Appl. Phys. 73, 7810 (1993).Google Scholar
Sakeek, H.F., Morrow, T., Graham, W.G., and Walmsley, D.G., J. Appl. Phys. 75, 1138 (1994).Google Scholar
El-Astal, A.H., Ikram, S., Morrow, T., Graham, W.G., and Walmsley, D.G., J. Appl. Phys. 77, 6572 (1995).Google Scholar
Geohegan, D.B. and Mashburn, D.N., Appl. Phys. Lett. 55, 2345 (1989).Google Scholar
Estler, R.C. and Nogar, N.S., J. Appl. Phys. 69, 1654 (1991).Google Scholar
Otis, CE. and Goodwin, P.M., J. Appl. Phys. 73, 1957 (1993).Google Scholar
Gupta, A., J. Appl. Phys. 73, 7877 (1993).Google Scholar
S. Liu, , J. Haigis, , M.B. DiTatanto, , K. Kinsella, , J.R. Markham, , Q. Li, , D.B. Fenner, , P.R. Solomon, , S. Farquharson, , and P.W. Morrison, , SPIE Proceedings, 2367, 171 (1994).Google Scholar
Li, Q., Liu, S., Fenner, D.B., Luo, J., Hamblen, W.D., and Haigis, J., IEEE Trans. Appl. Supercon. 5, 1513 (1995). Continuum Corp., Santa Clara, CA, model NY-61-10. Ocean Optics Inc., Dunedin, FL, model S1000.Google Scholar
Göres, J., Kung, P.-J., and Fenner, D.B. (to be published).Google Scholar
Phelps III, F.M., M.I.T. Wavelength Tables. Vol. 2 (MIT Press, Cambridge, 1982).Google Scholar
Kung, P.-J., Fenner, D.B., Potrepka, D.M., and Budnick, J.I. (to be published).Google Scholar