Skip to main content Accessibility help
×
Home

In-Situ Plume Diagnosis During Pulsed Laser Deposition of Epitaxial-Oxide Thin Films

  • David B. Fenner (a1), Pang-Jen Kung (a1), Jörn Gores (a1) and Qi Li (a2)

Abstract

The visible plume, induced during pulsed-laser deposition (PLD) of epitaxial La0.5.jSr0.5 5CoO3/Ba0.4Sr0.6TiO3/La0.5Sr0 5CoO3/YBa2Cu3O7/YSZ heterostructures on silicon (100) wafers, was studied by optical-emission spectroscopy (OES). These films are suitable for the fabrication of ferroelectric capacitors and pyroelectric-sensor devices. A YAG laser, at 266 nm, is used for ablation. A collection lens transfers the PLD-plume emission into an optical fiber and onto a diffraction grating and a CCD array, for time-averaged spectroscopy from 410 to 640 nm. Plume emissions from ablated targets in the presence of an oxygen ambient, due to various atomic (Ba, Co, Cu, Sr, Ti, Y, Zr), ionic (Ba+, La+, Sr+, Y+), and a diatomic oxide (YO) species were identified. Emission intensity and evolution of ablated species are reported for distance away from the target surface, oxygen pressures, and laser fluences (1 to 4 J/cm2). The behavior of reactive-product species, especially YO for plumes from yttria-stabilized zirconia (YSZ) and YBCO targets, is discussed. This simple and inexpensive OES system is suitable for use as a plume-quality monitor on routine PLD film synthesis.

Copyright

References

Hide All
Geohegan, D. B., in Pulsed Laser Deposition of Thin Films, edited by Chrisey, D. B. and Hubler, G.K. (J. Wiley, 1994) pp. 115165.
Wu, X.D., Dutta, B., Hegde, M.S., Inam, A., Venkatesan, T., Chase, E. W., Chang, C.C., and Howard, R., Appl. Phys. Lett. 54, 179 (1989).
Geyer, T. and Weimer, W. A., Appl. Phys. Lett. 54, 469 (1989).
Yoo, K.M., Alfano, R.R., Guo, X., Sarachik, M.P., and Isaacs, L.L., Appl. Phys. Lett. 54, 1278 (1989).
Girault, C., Damiani, D., Aubreton, J. and Catherinot, A., Appl. Phys. Lett. 54, 2035 (1989);
Girault, C., Damiani, D., Aubreton, J. and Catherinot, A., Appl. Phys. Lett. 55, 182 (1989).
Fried, D., Reck, G.P., Kushida, T., and Rothe, E.W., J. Appl. Phys. 70, 2337 (1991).
D. Fried, , T. Kushida, , G.P. Reck, , and E.W. Rothe, , J. Appl. Phys. 73, 7810 (1993).
Sakeek, H.F., Morrow, T., Graham, W.G., and Walmsley, D.G., J. Appl. Phys. 75, 1138 (1994).
El-Astal, A.H., Ikram, S., Morrow, T., Graham, W.G., and Walmsley, D.G., J. Appl. Phys. 77, 6572 (1995).
Geohegan, D.B. and Mashburn, D.N., Appl. Phys. Lett. 55, 2345 (1989).
Estler, R.C. and Nogar, N.S., J. Appl. Phys. 69, 1654 (1991).
Otis, CE. and Goodwin, P.M., J. Appl. Phys. 73, 1957 (1993).
Gupta, A., J. Appl. Phys. 73, 7877 (1993).
S. Liu, , J. Haigis, , M.B. DiTatanto, , K. Kinsella, , J.R. Markham, , Q. Li, , D.B. Fenner, , P.R. Solomon, , S. Farquharson, , and P.W. Morrison, , SPIE Proceedings, 2367, 171 (1994).
Li, Q., Liu, S., Fenner, D.B., Luo, J., Hamblen, W.D., and Haigis, J., IEEE Trans. Appl. Supercon. 5, 1513 (1995). Continuum Corp., Santa Clara, CA, model NY-61-10. Ocean Optics Inc., Dunedin, FL, model S1000.
Göres, J., Kung, P.-J., and Fenner, D.B. (to be published).
Phelps III, F.M., M.I.T. Wavelength Tables. Vol. 2 (MIT Press, Cambridge, 1982).
Kung, P.-J., Fenner, D.B., Potrepka, D.M., and Budnick, J.I. (to be published).

In-Situ Plume Diagnosis During Pulsed Laser Deposition of Epitaxial-Oxide Thin Films

  • David B. Fenner (a1), Pang-Jen Kung (a1), Jörn Gores (a1) and Qi Li (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed