Skip to main content Accessibility help
×
Home

In-situ Observation of Formation Processes of Anodic Porous Alumina on a Si Substrate Using Infrared Absorption Spectroscopy

  • Yasuo Kimura (a1) (a2), Hirokazu Shiraki (a1), Hisao Ishii (a1) (a2), Sachiko Ono (a3), Kingo Itaya (a2) (a4) and Michio Niwano (a1) (a2)...

Abstract

We investigated formation processes of a porous anodic alumina film on a p-type silicon (Si) substrate using infrared absorption spectroscopy in the multiple internal reflection geometry (MIR-IRAS). We observed drastic IR spectral changes when porous anodic alumina film approached interfaces between an aluminum (Al) layer and a Si substrate. The intensity of the IR absorption peaks due to water (H2O) molecules and silicon oxides (SiO2) increased simultaneously with a spike of anodic current density. The IR spectral changes indicated that the penetration of electrolytes brought about inhomogeneous oxidation of a Si substrate surface. We observed that the arrangement of the SiO2 nanodots closely reflected that of pores of a porous anodic alumina film. IR absorption peaks due to porous anodic alumina finally disappeared. The formation of SiO2 nanodots on a Si substrate promoted penetration of electrolytes to peel the porous anodic alumina film off it.

Copyright

References

Hide All
1. Masuda, H. and Fukuda, K., Science 268, 1466 (1995).
2. Li, J., Papadopoulos, C., Xu, J. M. and Moskovits, M., Appl. Phys. Lett. 75, 367 (1999).
3. Lu, B., Bharathulwar, S., Laughlin, D. E., and Lambeth, D. N. J. Appl. Phys. 87, 4721 (2000).
4. Nakao, M., Oku, S., Tanaka, H., Shibata, Y., Yokoo, A., Tamamura, T., and Masuda, H. Opt. Quant. Electron. 34, 183 (2002).
5. Masuda, H., Nishio, K., and Baba, N., J. Mater. Sci. Lett. 13, 338 (1994).
6. Ono, S., Masuko, N., Surf. Caot. Tech. 169–170, 139 (2003).
7. Masuda, H., Yasui, K., Sakamoto, Y., Nakao, M., Tamamura, T., and Nishio, K., Jpn. J. Appl. Phys, 40, L1267 (2001).
8. Shingubara, S., Okino, O., Murakami, Y., Sakaue, H., and Takahagi, T., J. Vac. Sci. Technol. B19, 1901 (2001).
9. Kanamori, Y., Hane, K., Sai, H., and Yugami, H., Appl. Phys. Lett. 78, 142 (2001).
10. Crouse, D., Lo, Y., Miller, A. E., and Crouse, M., Appl. Phys. Lett. 76, 49 (2000).
11. Rrost, R. L., Kloprogge, J. T., Russell, S. C., and Szetu, J., Appli. Spectrosc. 53, 572 (1999).
12. Chu, S. Z., Wada, K, Inoue, S., and Todoroki, S., J. Electrochem. Soc. 149, B321 (2002).
13. Asoh, H., Matsuo, M., Yoshihama, M., and Ono, S., Appl. Phys. Lett. 83, 4408 (2003).

In-situ Observation of Formation Processes of Anodic Porous Alumina on a Si Substrate Using Infrared Absorption Spectroscopy

  • Yasuo Kimura (a1) (a2), Hirokazu Shiraki (a1), Hisao Ishii (a1) (a2), Sachiko Ono (a3), Kingo Itaya (a2) (a4) and Michio Niwano (a1) (a2)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed