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The Influence of Silicon Overlayers on the Electrical Conductivity of Very Thin Chromium Films

Published online by Cambridge University Press:  21 February 2011

Andrej N. Aleshin  and
Klaus Schroder
Andrej N. Aleshin
Affiliation:
A.F.Ioffe Physico-Technical Institute, Polytechnicheskaya 26, 194021 St.Petersburg, Russia
Klaus Schroder
Affiliation:
Syracuse University, Department of Chemical Engineering and Materials Science, 13244 Syracuse, NY USA
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Abstract

The influence of silicon overlayers on the electrical conductivity of 5 nm to 10 nm thick chromium films has been studied. It was found that the deposition of silicon decreases the resistivity of Cr-film by up to 24 %. Possible mechanisms for the resistance decrease due to the silicon overlayer are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 318: Symposium Ca – Interface Control of Electrical, Chemical, and Mechanical Properties , 1993 , 465
Copyright
Copyright © Materials Research Society 1994

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References

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