Skip to main content Accessibility help
×
Home

Influence of Post-annealing Temperature on the Properties of Ti-Doped In2O3 Transparent Conductive Films by DC Ratio-frequency Sputtering

  • Lei Li (a1), Chen Chen (a1), Chengjun Dong (a1), JiaJia Cao (a1), Jingmin Dang (a1) and Yiding Wang (a1)...

Abstract

In this paper, titanium doped (2 wt. %) indium oxide (TIO) thin films deposited on quartz substrates by DC sputtering were presented. Dealt with different temperatures from 420°C to 620°C of post-annealing in vacuum for 40 minuets, the samples display different optical and electric properties. The deposited films exhibited polycrystalline in the preferred (222) and (440) orientation, with higher mobility (up to 48.6 cm2/VS) and lower resistivity (1.26 ×10-4Ω·cm) at the post-annealing temperature of 520°C. The average optical transmittance of the films is over 92% in a wavelength range from 300 to 1100 nm and the transmittance has only around 1.8% change with different post-annealing temperatures.

Copyright

References

Hide All
[1] Koida, T., kondo, M., J.Appl.Phys. 101 (2007)063713.
[2] Yang, M., Feng, J., Li, G., Zhang, Q., J. Crystal Growth 310(2008) 3474
[3] Gupta, R.K., Ghosh, K., Mishra, S.R., Kahol, P.K., Appl. Surf. Sci. 253 (2007) 9422.
[4] Gupta, R.K., Ghosh, K., Mishra, S.R., Kahol, P.K., Mater.Lett. 62 (2008) 1033.
[5] Hest, H.F.A.M., Dabney, M.S., Perkins, J.D., Ginley, D.S., Taylor, M.P., Appl. Phys. Lett. 87 (2005) 032111.
[6] Fang, Z.B., Yan, Z.J., Tan, Y.S., Liu, X.Q., Wang, Y.Y., Appl. Surf. Sci. 241 (2005) 303.
[7] Zhao, Z., Morel, D. L., Ferekides, C. S., The Solid Films 413(2002) 203.
[8] Frank, G., Kostlin, H., Appl. Phys. Lett. A: Solids Surf. 27(1982) 197.

Keywords

Influence of Post-annealing Temperature on the Properties of Ti-Doped In2O3 Transparent Conductive Films by DC Ratio-frequency Sputtering

  • Lei Li (a1), Chen Chen (a1), Chengjun Dong (a1), JiaJia Cao (a1), Jingmin Dang (a1) and Yiding Wang (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed