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The Influence of Point Defects on Diffusion and Gettering in Silicon

  • U. Gösele (a1) and T. Y. Tan (a2)

Abstract

In a first part, we deal with the influence of intrinsic point defects (vacancies and self-interstitials) on self- and impurity diffusion in silicon. Estimates of the diffusivities and thermal equilibrium concentrations of vacancies and self-interstitials are given. In a second partwe discuss the influence of point defects on the diffusion and precipitation of different types of metallic impurities in various gettering schemes as well as on the nucleation and growth of SiO2 precipitates.

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References

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The Influence of Point Defects on Diffusion and Gettering in Silicon

  • U. Gösele (a1) and T. Y. Tan (a2)

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