Skip to main content Accessibility help
×
Home

Influence of Metal Contamination on Minority Carrier Diffusion Length and Oxide Charge

  • J. Sakuma (a1), Y. Okui (a1), H. Miyazawa (a1), F. Inoue (a1) and M. Miyajima (a1)...

Abstract

Many kinds of ULSI Circuit (DRAM, LOGIC, FRAM [1] etc.) are produced at the same production line to reduce the costs. So we have to control many kinds of metal contamination. We investigated the influence of metal contamination on minority carrier diffusion length and oxide charge. The metal impurities we studied are Fe, Cu, Ni, Cr, Al, Na, Ca, FRAM electrode metals (Pt, Ru), metals included in PZT ferro-electric capacitors (Pb, Zr, Ti) [2], metals added to PZT (La, Nb) [3], and metals used for SBT Ferro-electric capacitors (Sr, Bi, Ta) [4].

Copyright

References

Hide All
[1] Kinney, W. I., Shephero, W., Miller, W., Evans, J., Womack, R., IEDM87 (1987. 12) pp. 850851
[2] Carrano, J., Sudhama, C., and Lee, J., Tasch, A., Miller, W., IEDM89 (1989), pp. 255258
[3] Tominaga, K. et al. Jpn. Appl. Phys. 32 (1993), 40824085
[4] Paz de Araujo, C. A., et al. Nature, Vol. 374, 13 p 627 (Apr., 1995)
[5] Goodman, A.M., J.Appl. Phys., vol.32, p. 2550 (1961).
[6] Lagowski, J., Edelman, P., Dexter, M., Henley, W., Semicond. Sci. Technol., vol. 7, p. A185 (1992).
[7] Lagowski, J., U.S. Patent No. 5,025,145
[8] Jastrzebski, Lubek, and Henley, Worth, SOLID STATE TECHNOLOGY, 35, p.27, Dec 1992.
[9] Edelman, P., Hoff, A. M., Jastrzebski, L., and Lagowski, J.. Proc. SPIE Vol. 2337, p. 154164, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing (09/1994)
[10] Hourai, M., Naridomi, T., Oka, Y., Murakami, K., Sumita, S., Fujino, N., and Shiraiwa, T., Jpn. J. Appl. Phys., 27, L2361 (1988)

Influence of Metal Contamination on Minority Carrier Diffusion Length and Oxide Charge

  • J. Sakuma (a1), Y. Okui (a1), H. Miyazawa (a1), F. Inoue (a1) and M. Miyajima (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed