Skip to main content Accessibility help

Improved MOCVD Growth of GaAs on Si

  • R.M. Lum (a1), J.K. Klingert (a1), B.A. Davidson (a2) and M.G. Lamont (a2)


In the direct growth of GaAs on Si by MOCVD the overall quality of the heteroepitaxial film is controlled to a large extent by the growth parameters of the initial GaAs buffer layer. We have investigated the structural properties of this layer using Rutherford Backscattering Spectrometry (RBS) and X-ray double crystal diffractometry. The crystallinity of the buffer layer was observed to improve with increasing layer thickness in the range 10–100nm, and then to rapidly degrade for thicker layers. High temperature (750°C) annealing of the buffer layers resulted in considerable reordering of all but the thicker (>200 nm) layers. Alteration of the usual GaAs/Si growth sequence to include an in-situ anneal of the buffer layer after growth interruption yielded GaAs films with improved structural, optical and electrical properties.



Hide All
[1] Akiyama, M., Kawarada, Y. and Kaminishi, K., Jpn. J. Appl. Phys. 23, L843 (1984).
[2] Lum, R.M., Klingert, J.K. and Dutt, B.V., J. Cryst. Growth 75, 421 (1986).
[3] Hirsch, P.B., Progress in Metal Physics, edited by Chalmers, B. and King, R. (Pergamon, New York, N.Y., 21956), Chap. 6.
[4] Hull, R. and Fischer-Colbrie, A., Appl. Phys. Lett. 50, 851 (1987).
[5] Chand, N., People, R., Baiocchi, F.A., Wecht, K.W. and Cho, A.Y., Appl. Phys. Lett. 49, 815 (1986).
[6] Lee, J.W., Shichijo, H., Tsai, H.L. and Matyi, R.J., Appl. Phys. Lett. 50, 31 (1987).
[7] Zemon, S., Shastry, S.K., Norris, P., Jagnnath, C. and Lambert, G., Solid State Comm. 58, 457 (1986).
[8] Harris, T.D. and Lamont, M.G., private communication.
[9] Macrander, A.T., Chu, S.N.G., Strege, K.E., Bloemeke, A.F. and Johnston, W.D. Jr., Appl. Phys. Lett. 44, 615 (1984).
[10] Hutson, A.R., J. Appl. 60, 1038 (1986).
[11] Lee, J.W., in Heteroepitaxy on Silicon, edited by Fan, J.C.C. and Poate, J.M. (Materials Research Society, Pittsburgh, PA, 1986), p. 29.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed