Skip to main content Accessibility help
×
Home

Imaging of Metal/Semiconductor Interface by Ballistic-Electron-Emission Microscopy (Beem)

  • E. Y. Lee (a1), B. R. Turnew (a1), J. R. Jimenez (a2) and L. J. Schowalter (a1)

Abstract

Studies in ballistic-electron-emission spectroscopy (BEES) have enabled precise energy measurements of Schottky barrier heights with excellent spatial resolution and, more recently, it was shown that even scattering at the metal/semiconductor interface affects the BEES spectrum [1]. Monte Carlo simulations have been done to predict the spatial resolution of ballistic-electron-emission microscopy (BEEM) [2]. In this paper, we will discuss the experimental spatial resolution of BEEM, and we will also give some of our BEES results for Au/Si and for Au/PtSi/Si. Our experimental BEEM studies indicate that, for Au/Si, hot electron transport is diffusive rather than ballistic, because the inelastic mean free path length (∼100 nm) is much larger than the elastic mean free path length (∼10 nm). This is in agreement with existing theories and with the literature on the internal photoemission method of studying the transport. Even in this diffusive regime, the spatial resolution of BEEM is still expected to be very good, being on the order of 10 nm [2]. Our preliminary work on PtSi shows that it has an attenuation length of 4 nm, which differs significantly from that of Au.

Copyright

References

Hide All
[1] Lee, E. Y. and Schowalter, L. J., Phys. Rev. B15, 45, 6325(1992).
[2] Schowalter, L. J. and Lee, E. Y., Phys. Rev. B15, 43, 9308(1991).
[3] Kaiser, W. J. and Bell, L. D., Phys. Rev. Lett. 60, 1406(1988).
[4] Stuart, R. N., Wooten, F., and Spicer, W. E., Phys. Rev. Lett. 10, 7(1963).
[5] Quinn, J. J., Phys. Rev. 126, 1453(1962); J. J. Quinn, Appl. Phys. Lett. 2, 167(1963).
[6] Niedermann, P., Quattropani, L., Solt, K., Kent, A. D., Fischer, o., J. Vac. Sci. Tech. B10, 580(1992).
[7] Tersoff, J. (unpublished).
[8] Prietsch, M. and Ludeke, R., Phys. Rev. Lett. 66, 2511(1991).
[9] Fernandez, A., Hallen, H. D., Huang, T., Buhrmen, R. A., and Silcox, J., Appl. Phys. Lett. 57, 2826(1990).
[10] Manion, S. J., Milliken, A. M., Bell, L. D., Hecht, M. H., Kaiser, W. J., Bull. Am. Phys. Society 37, 618(1992).
[11] Tung, R. T., Levi, A. F., Sullivan, J. P., and Shrey, F., Phys. Rev. Lett. 66, 72(1991).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed