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Hydrogenated Microcrystalline Silicon Solar Cells Made with Modified Very-High-Frequency Glow Discharge

  • Baojie Yan (a1), Kenneth Lord (a1), Jeffrey Yang (a1), Subhendu Guha (a1), Jozef Smeets (a2) and Jean-Marie Jacquet (a2)...

Abstract

Hydrogenated microcrystalline silicon (μc-Si:H) solar cells are made using modified veryhigh-frequency (MVHF) glow discharge at deposition rates ∼3-5 Å/s. We find that the solar cells made under certain conditions show degradation in air without intentional light soaking. The short-circuit current drops significantly within a few days after deposition, and then stabilizes. We believe that post-deposition oxygen diffusion along the grain boundaries or cracks is the origin of the ambient degradation. By optimizing the deposition conditions, we have found a plasma regime in which the μc-Si:H solar cells do not show such ambient degradation. The best a-Si:H/μc-Si:H double-junction solar cell has an initial active-area efficiency of 10.9% and is stable against the ambient degradation. The stability data of the solar cells after light soaking are also presented.

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Hydrogenated Microcrystalline Silicon Solar Cells Made with Modified Very-High-Frequency Glow Discharge

  • Baojie Yan (a1), Kenneth Lord (a1), Jeffrey Yang (a1), Subhendu Guha (a1), Jozef Smeets (a2) and Jean-Marie Jacquet (a2)...

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