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Hydrogen Neutralization of Shallow-Donor Impurities in Single-Crystal Silicon
Published online by Cambridge University Press: 26 February 2011
Abstract
New data are presented that considerably strengthen the conclusion, reported previously, that hydrogen can passivate shallow donors in silicon by associating with them to form neutral complexes. Effects of inhomogeneity of doping with depth have been eliminated in the new experiments; the observed increase of the effective Hall mobility after hydrogenation requires neutralization of ionizeddonor scattering centers.
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- Copyright © Materials Research Society 1988
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