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Hybrid Polymer/Ultrathin Porous Nanocrystalline Silicon Membranes System for Flow-through Chemical Vapor and Gas Detection

  • Maryna Kavalenka (a1), David Fang (a2), Christopher C Striemer (a3), James L McGrath (a4) and Philippe M Fauchet (a5)...

Abstract

Here we discuss a novel capacitive-type chemical sensor structure that uses recently discovered porous nanocrystalline silicon (pnc-Si) membranes [1] covered with metal as the capacitor plates while a polymer layer sandwiched between them serves as the sensing layer for solvent vapor detection. Pnc-Si is new ultrathin (15 nm) membrane material with pore sizes ranging from 5 to 50 nm and porosities from < 0.1 to 15 % that is fabricated using standard silicon semiconductor processing techniques. We present a study of pnc-Si membranes as a platform for such a sensor. The degree of swelling and the reversibility of the polymer/pnc-Si membrane system immersed in analyte-containing vapors are observed using optical and electrical techniques.

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Hybrid Polymer/Ultrathin Porous Nanocrystalline Silicon Membranes System for Flow-through Chemical Vapor and Gas Detection

  • Maryna Kavalenka (a1), David Fang (a2), Christopher C Striemer (a3), James L McGrath (a4) and Philippe M Fauchet (a5)...

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