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Hybrid Polymer/Ultrathin Porous Nanocrystalline Silicon Membranes System for Flow-through Chemical Vapor and Gas Detection

Published online by Cambridge University Press:  31 January 2011

Maryna Kavalenka ,
David Fang ,
Christopher C Striemer ,
James L McGrath  and
Philippe M Fauchet
Maryna Kavalenka
Affiliation:
kavalenk@ece.rochester.edu, University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
David Fang
Affiliation:
dafang@ece.rochester.edu, University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
Christopher C Striemer
Affiliation:
cstriemer@simpore.com, University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
James L McGrath
Affiliation:
jmcgrath@bme.rochester.edu, University of Rochester, Biomedical Engineering, Rochester, New York, United States
Philippe M Fauchet
Affiliation:
fauchet@seas.rochester.edu, University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
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Abstract

Here we discuss a novel capacitive-type chemical sensor structure that uses recently discovered porous nanocrystalline silicon (pnc-Si) membranes [1] covered with metal as the capacitor plates while a polymer layer sandwiched between them serves as the sensing layer for solvent vapor detection. Pnc-Si is new ultrathin (15 nm) membrane material with pore sizes ranging from 5 to 50 nm and porosities from < 0.1 to 15 % that is fabricated using standard silicon semiconductor processing techniques. We present a study of pnc-Si membranes as a platform for such a sensor. The degree of swelling and the reversibility of the polymer/pnc-Si membrane system immersed in analyte-containing vapors are observed using optical and electrical techniques.

Keywords

sensornanostructureelectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1190: Symposium NN – Active Polymers , 2009 , 1190-NN12-03
Copyright
Copyright © Materials Research Society 2009

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