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High Yield Polymer MEMS Process for CMOS/MEMS Integration

  • Prasenjit Ray (a1), V. Seena (a1), Prakash R. Apte (a1) and Ramgopal Rao (a1)

Abstract

MEMS community is increasingly using SU-8 as a structural material because it is self-patternable, compliant and needs a low thermal budget. While the exposed layers act as the structural layers, the unexposed SU-8 layers can act as the sacrificial layers, thus making it similar to a surface micromachining process. A sequence of exposed and unexposed SU-8 layers should lead to the development of a SU-8 based MEMS chip integrated with a pre-processed CMOS wafer. A process consisting of optical lithography to obtain SU-8 structures on a CMOS wafer is described in this paper.

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1. Vora, K D, Shew, B Y, Harvey, E C, Hayes, J P and Peele, A G J. Micromech. Microeng. 15 978 (2005).
2. Jiang, K, Lancaster, M J, Llamas-Garro, I. and Jin, P. J. Micromech. Microeng. 15, 1522 (2005)
3. Williams, J D and Wang, W Microsyst.Technol. 10, 694 (2004)
4. Zhang, J, Chan-Park, M B and Conner, S R Lab on a Chip 4 646 (2004)
5. Chang, H-K. and Kim, Y-K. Sensors Actuators A 84, 342 (2000)
6. Gammelgaard, L., Rasmussen, P. A., Calleja, M., Vettiger, P., and Boisen, A. Appl. Phy. Lett 88, 113508(2006)
7. Seena, V, Anukool, Rajorya, Prita, Pant, Mukherji, S, Ramgopal Rao, V Solid State Science, 11, 1606 (2009)
8. Prashant, Mali, Aniruddh, Sarkar, Rakesh, Lal, Lab on Chip 6 310 (2006)
9. Ceyssens, F, Puers, R J Micromech. Microeng. 16(6) 19(2006)
10. Seidemann, V, Rabe, J, Feldmann, M and Buttgenbach, S Microsyst. Technol. 8 348(2002)
11. Bertsch, A, Lorenz, H and Renaud, P Sensors Actuators A 73 14(1999)
12. Chuang, Y-J, Tseng, F-G, Cheng, J-H and Lin, W-K Sensors Actuators A 103 64(2003)
13. Tay, F. H., Kan, J. A., Watt, F., Choong, W. O. J. Micromech. Microeng 11(1) 27 (2000).
14. Foulds, I G and Parameswaran, M J. Micromech. Microeng. 16, 2109 (2006)

Keywords

High Yield Polymer MEMS Process for CMOS/MEMS Integration

  • Prasenjit Ray (a1), V. Seena (a1), Prakash R. Apte (a1) and Ramgopal Rao (a1)

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