Skip to main content Accessibility help
×
Home

High Throughput X-ray Diffractometer for Combinatorial Epitaxial Thin Films

  • M. Ohtani (a1), T. Fukumura (a2), A. Ohtomo (a1), T. Kikuchi (a3), K. Omote (a3), H. Koinuma (a1) (a4) (a5) and M. Kawasaki (a1) (a2) (a5)...

Abstract

We report on the development of a high throughput x-ray diffractometer that concurrently measures spatially resolved x-ray diffraction (XRD) spectra of epitaxial thin films integrated on a substrate. A convergent x-ray is focused into a stripe on a substrate and the diffracted beam is detected with a two-dimensional x-ray detector, so that the snapshot image represents a mapping of XRD intensity with the axes of the diffraction angle and the position in the sample. High throughput characterization of crystalline structure is carried out for a BaxSr1-xTiO3 composition-spread film on a SrTiO3 substrate. Not only the continuous spread of the composition (x), but also the continuous spread of the growth temperature (T) are given to the film by employing a special heating method. The boundary between the strained lattice and relaxed lattice is visualized by the concurrent XRD as functions of x and T in a high throughput fashion.

Copyright

References

Hide All
1. Xiang, X.-D., Sun, X., Briceno, G., Lou, Y., Wang, K.-A., Chang, H., Wallace-Freedman, W. G., Chen, S.-W., and Schultz, P. G., Science 268, 1738 (1995).
2. Matsumoto, Y., Murakami, M., Jin, Z., Ohtomo, A., Lippmaa, M., Kawasaki, M., and Koinuma, H., Jpn. J. Appl. Phys. 38, L603 (1999).
3. Ohnishi, T., Komiyama, D., Koida, T., Ohhashi, S., Stauter, C., Koinuma, H., Ohtomo, A., Lippmaa, M., Nakagawa, N., Kawasaki, M., Kikuchi, T., Omote, K., Appl. Phys. Lett. 79, 536 (2001).
4. Fukumura, T., Okimoto, Y., Ohtani, M., Kageyama, T., Koida, T., Kawasaki, M., Hasegawa, T., Tokura, Y., and Koinuma, H., Appl. Phys. Lett. 77, 3426 (2000).
5. Isaacs, E. D., Marcus, M., Aeppli, G., Xiang, X.-D., Sun, X., Schultz, P. G., Kao, H.-K., Cargill, G. S. III, and Haushalter, R., Appl. Phys. Lett. 73, 1820 (1998).
6. Ohtani, M., Fukumura, T., Kawasaki, M., Omote, K., Kikuchi, T., Harada, J., Ohtomo, A., Lippmaa, M., Ohnishi, T., Komiyama, D., Takahashi, R., Matsumoto, Y., and Koinuma, H., Appl. Phys. Lett. 79, 3594 (2001).
7. Ohashi, S., Lippmaa, M., Nakagawa, N., Koinuma, H., and Kawasaki, M., Rev. Sci. Instrum. 70, 178 (1999).

High Throughput X-ray Diffractometer for Combinatorial Epitaxial Thin Films

  • M. Ohtani (a1), T. Fukumura (a2), A. Ohtomo (a1), T. Kikuchi (a3), K. Omote (a3), H. Koinuma (a1) (a4) (a5) and M. Kawasaki (a1) (a2) (a5)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed