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High Resolution Organic Thin Film Mapping for Process Control

Published online by Cambridge University Press:  25 February 2011

David Denenberg  and
Austin R. Blew
David Denenberg
Affiliation:
Lehighton Electronics, Inc., P.O. Box 328, Lehighton, PA 18235 USA
Austin R. Blew
Affiliation:
Lehighton Electronics, Inc., P.O. Box 328, Lehighton, PA 18235 USA
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Abstract

ABSTRACT; This paper describes the use of advanced circuitry nondestructive eddy current techniques to map organic Thin Films. Surface profiles, contour maps and diameter scans are obtained from the process wafers tested providing the necessary information to control the processes for maximum yield.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 247: Symposium N – Electrical, Optical, and Magnetic Properties of Organic Solid State Materials , 1992 , 871
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Wiley, J. D. (private communication)Google Scholar
2. Brophy, M., EDI (private communication)Google Scholar
3. Tompa, G. S., McKee, M. A., Beckham, C., Zawadzki, P. A., Colabella, J. M., Reinert, P. D., Capuder, K., Stall, R. A., and Norris, P. E., presented at the 4th International Conference on Metalorganic Vapor Phase Epitaxy 1988.Google Scholar
4. Christ, R. (private communication)Google Scholar
5. Hagley, A. (private communication)Google Scholar
6. Barrett, D. L., Eldridge, G. W., Clarke, R. C. and Thomas, R. N. GaAs IC Symposium IEEE 1987 Google Scholar
7. Lin, B. J. F., Luechinger, H., Kocot, C. P., Littatt, E., Stout, C., McFarland, M., Rohdin, H., Kofol, J. S., Jaeger, R. P., and Mars, D. E.. GaAs IC Symposium IEEE 1987 Google Scholar
8. Gray, M. L., Reynolds, C. L., Parsey, J. M. Jr, J. Appl. Phys., Vol. 68, No. 1, 1 July 1990 Google Scholar
9. Miller, G. L., Wiley, J. D., Robinson, D. A. H., Rev. Sci. Instrum. 19 Vol 47, Nov. 7, July 1976 Google Scholar